3-D Design and Simulation of a Piezoelectric Micropump
The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/4/259 |
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| author | Seyed Amir Fouad Farshchi Yazdi Alberto Corigliano Raffaele Ardito |
| author_facet | Seyed Amir Fouad Farshchi Yazdi Alberto Corigliano Raffaele Ardito |
| author_sort | Seyed Amir Fouad Farshchi Yazdi |
| collection | DOAJ |
| description | The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid–structure interaction. The maximum predicted outflow is 1.62 μL min<inline-formula> <math display="inline"> <semantics> <msup> <mrow></mrow> <mrow> <mo>−</mo> <mn>1</mn> </mrow> </msup> </semantics> </math> </inline-formula>, obtained at 10 Hz working frequency. The computational model enables the optimization of geometrical features, with the goal to improve the pumping efficiency: The outflow is increased until 2.5 μL min<inline-formula> <math display="inline"> <semantics> <msup> <mrow></mrow> <mrow> <mo>−</mo> <mn>1</mn> </mrow> </msup> </semantics> </math> </inline-formula>. |
| first_indexed | 2024-04-14T05:18:33Z |
| format | Article |
| id | doaj.art-7e41dd71a0644f848c87cedf0e86c427 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-04-14T05:18:33Z |
| publishDate | 2019-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-7e41dd71a0644f848c87cedf0e86c4272022-12-22T02:10:17ZengMDPI AGMicromachines2072-666X2019-04-0110425910.3390/mi10040259mi100402593-D Design and Simulation of a Piezoelectric MicropumpSeyed Amir Fouad Farshchi Yazdi0Alberto Corigliano1Raffaele Ardito2MEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, ItalyMEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, ItalyMEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, ItalyThe objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid–structure interaction. The maximum predicted outflow is 1.62 μL min<inline-formula> <math display="inline"> <semantics> <msup> <mrow></mrow> <mrow> <mo>−</mo> <mn>1</mn> </mrow> </msup> </semantics> </math> </inline-formula>, obtained at 10 Hz working frequency. The computational model enables the optimization of geometrical features, with the goal to improve the pumping efficiency: The outflow is increased until 2.5 μL min<inline-formula> <math display="inline"> <semantics> <msup> <mrow></mrow> <mrow> <mo>−</mo> <mn>1</mn> </mrow> </msup> </semantics> </math> </inline-formula>.https://www.mdpi.com/2072-666X/10/4/259piezoelectric materialmultiphysics simulationfinite element method (FEM)fluid–structure interaction (FSI)micro electromechanical systems (MEMS) |
| spellingShingle | Seyed Amir Fouad Farshchi Yazdi Alberto Corigliano Raffaele Ardito 3-D Design and Simulation of a Piezoelectric Micropump Micromachines piezoelectric material multiphysics simulation finite element method (FEM) fluid–structure interaction (FSI) micro electromechanical systems (MEMS) |
| title | 3-D Design and Simulation of a Piezoelectric Micropump |
| title_full | 3-D Design and Simulation of a Piezoelectric Micropump |
| title_fullStr | 3-D Design and Simulation of a Piezoelectric Micropump |
| title_full_unstemmed | 3-D Design and Simulation of a Piezoelectric Micropump |
| title_short | 3-D Design and Simulation of a Piezoelectric Micropump |
| title_sort | 3 d design and simulation of a piezoelectric micropump |
| topic | piezoelectric material multiphysics simulation finite element method (FEM) fluid–structure interaction (FSI) micro electromechanical systems (MEMS) |
| url | https://www.mdpi.com/2072-666X/10/4/259 |
| work_keys_str_mv | AT seyedamirfouadfarshchiyazdi 3ddesignandsimulationofapiezoelectricmicropump AT albertocorigliano 3ddesignandsimulationofapiezoelectricmicropump AT raffaeleardito 3ddesignandsimulationofapiezoelectricmicropump |