Coupled Micromachined Magnetic Resonators for Microwave Signal Processing
In this paper, the theory, micromachining technology, and experimental results of the coupling of integrated magnetic film-based resonators for microwave signal filtering are presented. This is an extended contribution to the field of magnetostatic wave coupled resonators, including details about th...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/2/259 |
| _version_ | 1797297480447033344 |
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| author | Romolo Marcelli Andrea Lucibello Emanuela Proietti Takuro Koike |
| author_facet | Romolo Marcelli Andrea Lucibello Emanuela Proietti Takuro Koike |
| author_sort | Romolo Marcelli |
| collection | DOAJ |
| description | In this paper, the theory, micromachining technology, and experimental results of the coupling of integrated magnetic film-based resonators for microwave signal filtering are presented. This is an extended contribution to the field of magnetostatic wave coupled resonators, including details about the technological results, circuit theory, and perspective applications for tunable integrated coupled magnetic resonators. An analytical approach using the magnetostatic wave approximation is used to derive the coupling coefficient between adjacent resonators coupled by the electromagnetic field decaying outside the resonators. Then, micromachining employing hot phosphoric acid etching is presented to manufacture integrated coupled resonators. Finally, circuit modeling and experimental results obtained using the ferromagnetic resonance technique are discussed. |
| first_indexed | 2024-03-07T22:20:58Z |
| format | Article |
| id | doaj.art-7e4baefcc20842f79bc9df396bbe5a49 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:20:58Z |
| publishDate | 2024-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-7e4baefcc20842f79bc9df396bbe5a492024-02-23T15:27:49ZengMDPI AGMicromachines2072-666X2024-02-0115225910.3390/mi15020259Coupled Micromachined Magnetic Resonators for Microwave Signal ProcessingRomolo Marcelli0Andrea Lucibello1Emanuela Proietti2Takuro Koike3Institute for Microelectronics and Microsystems (CNR-IMM), 00133 Rome, ItalyInstitute for Microelectronics and Microsystems (CNR-IMM), 00133 Rome, ItalyInstitute for Microelectronics and Microsystems (CNR-IMM), 00133 Rome, ItalyDepartment of Electronic Engineering, Tamagawa University, Machida, Tokyo 194-8610, JapanIn this paper, the theory, micromachining technology, and experimental results of the coupling of integrated magnetic film-based resonators for microwave signal filtering are presented. This is an extended contribution to the field of magnetostatic wave coupled resonators, including details about the technological results, circuit theory, and perspective applications for tunable integrated coupled magnetic resonators. An analytical approach using the magnetostatic wave approximation is used to derive the coupling coefficient between adjacent resonators coupled by the electromagnetic field decaying outside the resonators. Then, micromachining employing hot phosphoric acid etching is presented to manufacture integrated coupled resonators. Finally, circuit modeling and experimental results obtained using the ferromagnetic resonance technique are discussed.https://www.mdpi.com/2072-666X/15/2/259micromachiningmagnetostatic wavesresonatorsmicrowave filters |
| spellingShingle | Romolo Marcelli Andrea Lucibello Emanuela Proietti Takuro Koike Coupled Micromachined Magnetic Resonators for Microwave Signal Processing Micromachines micromachining magnetostatic waves resonators microwave filters |
| title | Coupled Micromachined Magnetic Resonators for Microwave Signal Processing |
| title_full | Coupled Micromachined Magnetic Resonators for Microwave Signal Processing |
| title_fullStr | Coupled Micromachined Magnetic Resonators for Microwave Signal Processing |
| title_full_unstemmed | Coupled Micromachined Magnetic Resonators for Microwave Signal Processing |
| title_short | Coupled Micromachined Magnetic Resonators for Microwave Signal Processing |
| title_sort | coupled micromachined magnetic resonators for microwave signal processing |
| topic | micromachining magnetostatic waves resonators microwave filters |
| url | https://www.mdpi.com/2072-666X/15/2/259 |
| work_keys_str_mv | AT romolomarcelli coupledmicromachinedmagneticresonatorsformicrowavesignalprocessing AT andrealucibello coupledmicromachinedmagneticresonatorsformicrowavesignalprocessing AT emanuelaproietti coupledmicromachinedmagneticresonatorsformicrowavesignalprocessing AT takurokoike coupledmicromachinedmagneticresonatorsformicrowavesignalprocessing |