Substrate Partitioning Scheme for Compact Charge Modeling of Multigate MOSFETs
A modeling approach for the charge-voltage characteristics of multigate metal-oxide-semiconductor field-effect transistors with complicated cross sections is proposed. Using solutions of linear equations, the substrate region is partitioned into several 1-D MOS structures and the coupling capacitanc...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2017-01-01
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Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/7880655/ |
Summary: | A modeling approach for the charge-voltage characteristics of multigate metal-oxide-semiconductor field-effect transistors with complicated cross sections is proposed. Using solutions of linear equations, the substrate region is partitioned into several 1-D MOS structures and the coupling capacitances between these structures are evaluated. It is numerically demonstrated that the set of 1-D MOS structures together with the coupling capacitances yields excellent agreement in the charge-voltage characteristics in all operational regimes. Moreover, further simplification allows us to model the charge-voltage characteristics accurately with only two MOS structures. |
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ISSN: | 2168-6734 |