Characterization of a PCB Based Pressure Sensor and Its Joining Methods for the Metal Membrane

Essential quality features of pressure sensors are, among other accuracy-related factors, measurement range, operating temperature, and long-term stability. In this work, these features are optimized for a capacitive pressure sensor with a measurement range of 10 bars. The sensor consists of a metal...

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Hlavní autoři: Adrian Schwenck, Tobias Grözinger, Thomas Günther, Axel Schumacher, Dietmar Schuhmacher, Kai Werum, André Zimmermann
Médium: Článek
Jazyk:English
Vydáno: MDPI AG 2021-08-01
Edice:Sensors
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On-line přístup:https://www.mdpi.com/1424-8220/21/16/5557