Characterization of a PCB Based Pressure Sensor and Its Joining Methods for the Metal Membrane

Essential quality features of pressure sensors are, among other accuracy-related factors, measurement range, operating temperature, and long-term stability. In this work, these features are optimized for a capacitive pressure sensor with a measurement range of 10 bars. The sensor consists of a metal...

Szczegółowa specyfikacja

Opis bibliograficzny
Główni autorzy: Adrian Schwenck, Tobias Grözinger, Thomas Günther, Axel Schumacher, Dietmar Schuhmacher, Kai Werum, André Zimmermann
Format: Artykuł
Język:English
Wydane: MDPI AG 2021-08-01
Seria:Sensors
Hasła przedmiotowe:
Dostęp online:https://www.mdpi.com/1424-8220/21/16/5557