Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging
Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on si...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2015-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/15/4/8020 |
| _version_ | 1798026775474733056 |
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| author | Yongqiang Qiu James V. Gigliotti Margeaux Wallace Flavio Griggio Christine E. M. Demore Sandy Cochran Susan Trolier-McKinstry |
| author_facet | Yongqiang Qiu James V. Gigliotti Margeaux Wallace Flavio Griggio Christine E. M. Demore Sandy Cochran Susan Trolier-McKinstry |
| author_sort | Yongqiang Qiu |
| collection | DOAJ |
| description | Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed. |
| first_indexed | 2024-04-11T18:40:44Z |
| format | Article |
| id | doaj.art-7e96870ed4b34f3abf54213f681772a7 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T18:40:44Z |
| publishDate | 2015-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-7e96870ed4b34f3abf54213f681772a72022-12-22T04:08:58ZengMDPI AGSensors1424-82202015-04-011548020804110.3390/s150408020s150408020Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and ImagingYongqiang Qiu0James V. Gigliotti1Margeaux Wallace2Flavio Griggio3Christine E. M. Demore4Sandy Cochran5Susan Trolier-McKinstry6Institute for Medical Science and Technology, University of Dundee, Dundee DD2 1FD, UKMaterials Research Institute, The Pennsylvania State University, University Park, PA 16802, USAMaterials Research Institute, The Pennsylvania State University, University Park, PA 16802, USAMaterials Research Institute, The Pennsylvania State University, University Park, PA 16802, USAInstitute for Medical Science and Technology, University of Dundee, Dundee DD2 1FD, UKInstitute for Medical Science and Technology, University of Dundee, Dundee DD2 1FD, UKMaterials Research Institute, The Pennsylvania State University, University Park, PA 16802, USAMany applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.http://www.mdpi.com/1424-8220/15/4/8020ultrasoundpiezoelectric thin filmsmicromachined ultrasound transducersarraysintegrated transducers |
| spellingShingle | Yongqiang Qiu James V. Gigliotti Margeaux Wallace Flavio Griggio Christine E. M. Demore Sandy Cochran Susan Trolier-McKinstry Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging Sensors ultrasound piezoelectric thin films micromachined ultrasound transducers arrays integrated transducers |
| title | Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging |
| title_full | Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging |
| title_fullStr | Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging |
| title_full_unstemmed | Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging |
| title_short | Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging |
| title_sort | piezoelectric micromachined ultrasound transducer pmut arrays for integrated sensing actuation and imaging |
| topic | ultrasound piezoelectric thin films micromachined ultrasound transducers arrays integrated transducers |
| url | http://www.mdpi.com/1424-8220/15/4/8020 |
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