Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on si...

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Bibliographic Details
Main Authors: Yongqiang Qiu, James V. Gigliotti, Margeaux Wallace, Flavio Griggio, Christine E. M. Demore, Sandy Cochran, Susan Trolier-McKinstry
Format: Article
Language:English
Published: MDPI AG 2015-04-01
Series:Sensors
Subjects:
ultrasound
piezoelectric thin films
micromachined ultrasound transducers
arrays
integrated transducers
Online Access:http://www.mdpi.com/1424-8220/15/4/8020

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