Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed Analysis

This paper discusses in detail the effects of Sub-10nm fin-width (Wfin) on the analog performance and variability of FinFETs. It is observed through detailed measurements that the transconductance degrades and output conductance improves with the reduction in fin-width. Through different analog perf...

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Main Authors: Mandar S. Bhoir, Thomas Chiarella, Lars Ake Ragnarsson, Jerome Mitard, Valentina Terzeiva, Naoto Horiguchi, Nihar R. Mohapatra
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8794627/
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author Mandar S. Bhoir
Thomas Chiarella
Lars Ake Ragnarsson
Jerome Mitard
Valentina Terzeiva
Naoto Horiguchi
Nihar R. Mohapatra
author_facet Mandar S. Bhoir
Thomas Chiarella
Lars Ake Ragnarsson
Jerome Mitard
Valentina Terzeiva
Naoto Horiguchi
Nihar R. Mohapatra
author_sort Mandar S. Bhoir
collection DOAJ
description This paper discusses in detail the effects of Sub-10nm fin-width (Wfin) on the analog performance and variability of FinFETs. It is observed through detailed measurements that the transconductance degrades and output conductance improves with the reduction in fin-width. Through different analog performance metrics, it is shown that analog circuit performance, in Sub-10nm Wfin regime, cannot be improved just by Wfin scaling but by optimizing source/drain resistance, gate dielectric thickness together with the Wfin scaling. We also explored the effect of process induced total and random variability on trans-conductance and output conductance of FinFETs. A systematic strategy to decouple different variability sources has been discussed and it is shown that mobility, source/drain resistance and oxide thickness are the critical parameters to reduce variability.
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spelling doaj.art-7ec5231a8fcc4f308d70b5c2a1896db42022-12-21T18:35:44ZengIEEEIEEE Journal of the Electron Devices Society2168-67342019-01-0171217122410.1109/JEDS.2019.29345758794627Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed AnalysisMandar S. Bhoir0https://orcid.org/0000-0001-7914-8603Thomas Chiarella1Lars Ake Ragnarsson2Jerome Mitard3Valentina Terzeiva4Naoto Horiguchi5Nihar R. Mohapatra6https://orcid.org/0000-0002-8827-5417Department of Electrical Engineering, Indian Institute of Technology Gandhinagar, Gandhinagar, IndiaLogic Technologies, Interuniversity Microelectronics Center, Leuven, BelgiumLogic Technologies, Interuniversity Microelectronics Center, Leuven, BelgiumLogic Technologies, Interuniversity Microelectronics Center, Leuven, BelgiumLogic Technologies, Interuniversity Microelectronics Center, Leuven, BelgiumLogic Technologies, Interuniversity Microelectronics Center, Leuven, BelgiumDepartment of Electrical Engineering, Indian Institute of Technology Gandhinagar, Gandhinagar, IndiaThis paper discusses in detail the effects of Sub-10nm fin-width (Wfin) on the analog performance and variability of FinFETs. It is observed through detailed measurements that the transconductance degrades and output conductance improves with the reduction in fin-width. Through different analog performance metrics, it is shown that analog circuit performance, in Sub-10nm Wfin regime, cannot be improved just by Wfin scaling but by optimizing source/drain resistance, gate dielectric thickness together with the Wfin scaling. We also explored the effect of process induced total and random variability on trans-conductance and output conductance of FinFETs. A systematic strategy to decouple different variability sources has been discussed and it is shown that mobility, source/drain resistance and oxide thickness are the critical parameters to reduce variability.https://ieeexplore.ieee.org/document/8794627/FinFETsub-10nm fin-widthtechnology scalinganalog/RFvariabilitytransconductance
spellingShingle Mandar S. Bhoir
Thomas Chiarella
Lars Ake Ragnarsson
Jerome Mitard
Valentina Terzeiva
Naoto Horiguchi
Nihar R. Mohapatra
Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed Analysis
IEEE Journal of the Electron Devices Society
FinFET
sub-10nm fin-width
technology scaling
analog/RF
variability
transconductance
title Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed Analysis
title_full Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed Analysis
title_fullStr Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed Analysis
title_full_unstemmed Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed Analysis
title_short Analog Performance and its Variability in Sub-10 nm Fin-Width FinFETs: a Detailed Analysis
title_sort analog performance and its variability in sub 10 nm fin width finfets a detailed analysis
topic FinFET
sub-10nm fin-width
technology scaling
analog/RF
variability
transconductance
url https://ieeexplore.ieee.org/document/8794627/
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AT jeromemitard analogperformanceanditsvariabilityinsub10nmfinwidthfinfetsadetailedanalysis
AT valentinaterzeiva analogperformanceanditsvariabilityinsub10nmfinwidthfinfetsadetailedanalysis
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