| Summary: | We present the design and experimental measurement of tellurium oxide-clad silicon microring resonators with internal <i>Q</i> factors of up to 1.5 × 10<sup>6</sup>, corresponding to a propagation loss of 0.42 dB/cm at wavelengths around 1550 nm. This compares to a propagation loss of 3.4 dB/cm for unclad waveguides and 0.97 dB/cm for waveguides clad with SiO<sub>2</sub>. We compared our experimental results with the Payne–Lacey model describing propagation dominated by sidewall scattering. We conclude that the relative increase in the refractive index of TeO<sub>2</sub> reduces scattering sufficiently to account for the low propagation loss. These results, in combination with the promising optical properties of TeO<sub>2</sub>, provide a further step towards realizing compact, monolithic, and low-loss passive, nonlinear, and rare-earth-doped active integrated photonic devices on a silicon photonic platform.
|
|---|