Effect of target power on the structure and tribological Properties of La-Ti/WS2 composite films prepared by unbalanced magnetron sputtering
The properties of Physical Vacuum Deposit (PVD) films could be improved by doping rare earth elements and other metal elements. In this paper, La-Ti/WS _2 composite films were prepared by unbalanced magnetron sputtering. The effect of target power on the structure and properties of La-Ti/WS _2 compo...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2020-01-01
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Series: | Materials Research Express |
Subjects: | |
Online Access: | https://doi.org/10.1088/2053-1591/ab77f2 |