Fixation mechanisms of nanoparticles on substrates by electron beam irradiation

For applications such as the fabrication of plasmonic waveguides we developed a patterning technique to fabricate an array of nanoparticles on a substrate using focused electron beams (Noriki, T.; Abe, S.;.Kajikawa, K.; Shimojo, M. Beilstein J. Nanotechnol. 2015, 6, 1010–1015). This technique consis...

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Bibliographic Details
Main Authors: Daichi Morioka, Tomohiro Nose, Taiki Chikuta, Kazutaka Mitsuishi, Masayuki Shimojo
Format: Article
Language:English
Published: Beilstein-Institut 2017-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.8.153

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