The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode

A mechanical trigger inertial micro-switch with spring stationary electrode is proposed and fabricated by surface micromachining. The elastic contact process and stability performance are evaluated through experimental tests performed using a drop hammer. The test results show that the contact time...

Full description

Bibliographic Details
Main Authors: Wenguo Chen, Huiying Wang, Dejian Kong, Shulei Sun
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/18/12/4238
_version_ 1828354143431950336
author Wenguo Chen
Huiying Wang
Dejian Kong
Shulei Sun
author_facet Wenguo Chen
Huiying Wang
Dejian Kong
Shulei Sun
author_sort Wenguo Chen
collection DOAJ
description A mechanical trigger inertial micro-switch with spring stationary electrode is proposed and fabricated by surface micromachining. The elastic contact process and stability performance are evaluated through experimental tests performed using a drop hammer. The test results show that the contact time is about 110 μs and 100 μs when the threshold acceleration is 480 g and the overload acceleration is 602 g, respectively. The vibration process of the electrodes is explained through an established physical mode. The elastic contact process is analyzed and discussed by Finite Element Analysis (FEA) simulations, which indicated that the contact time is about 65 μs when the threshold acceleration is 600 g. At the same time, this result also proved that the contact time could be extended effectively by the designed spring stationary electrode. The overload acceleration (800 g) has been applied to the Finite-Element model in ANSYS, the contact process indicated that the proof mass contacted with stationary electrode three times, and there was no bounce phenomenon during contact process, which fully proved that the stable contact process can be realized at high acceleration owing to the designed elastic stationary electrode.
first_indexed 2024-04-14T02:19:56Z
format Article
id doaj.art-8021a78b1ccd4fa1a64dd639d5d49a49
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-04-14T02:19:56Z
publishDate 2018-12-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-8021a78b1ccd4fa1a64dd639d5d49a492022-12-22T02:18:05ZengMDPI AGSensors1424-82202018-12-011812423810.3390/s18124238s18124238The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary ElectrodeWenguo Chen0Huiying Wang1Dejian Kong2Shulei Sun3The School of Information Engineering, Qujing Normal University, Qujing, Yunnan 655000, ChinaThe School of Information Engineering, Qujing Normal University, Qujing, Yunnan 655000, ChinaThe School of Information Engineering, Qujing Normal University, Qujing, Yunnan 655000, ChinaThe School of Mechanical Engineering, Guizhou Institute of Technology, Guiyang, Guizhou 550003, ChinaA mechanical trigger inertial micro-switch with spring stationary electrode is proposed and fabricated by surface micromachining. The elastic contact process and stability performance are evaluated through experimental tests performed using a drop hammer. The test results show that the contact time is about 110 μs and 100 μs when the threshold acceleration is 480 g and the overload acceleration is 602 g, respectively. The vibration process of the electrodes is explained through an established physical mode. The elastic contact process is analyzed and discussed by Finite Element Analysis (FEA) simulations, which indicated that the contact time is about 65 μs when the threshold acceleration is 600 g. At the same time, this result also proved that the contact time could be extended effectively by the designed spring stationary electrode. The overload acceleration (800 g) has been applied to the Finite-Element model in ANSYS, the contact process indicated that the proof mass contacted with stationary electrode three times, and there was no bounce phenomenon during contact process, which fully proved that the stable contact process can be realized at high acceleration owing to the designed elastic stationary electrode.https://www.mdpi.com/1424-8220/18/12/4238MEMSinertial micro-switchsurface micromachiningcontact timespring stationary electrode
spellingShingle Wenguo Chen
Huiying Wang
Dejian Kong
Shulei Sun
The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode
Sensors
MEMS
inertial micro-switch
surface micromachining
contact time
spring stationary electrode
title The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode
title_full The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode
title_fullStr The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode
title_full_unstemmed The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode
title_short The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode
title_sort elastic contact and stability analysis of an inertial micro switch with a spring stationary electrode
topic MEMS
inertial micro-switch
surface micromachining
contact time
spring stationary electrode
url https://www.mdpi.com/1424-8220/18/12/4238
work_keys_str_mv AT wenguochen theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode
AT huiyingwang theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode
AT dejiankong theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode
AT shuleisun theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode
AT wenguochen elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode
AT huiyingwang elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode
AT dejiankong elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode
AT shuleisun elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode