The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode
A mechanical trigger inertial micro-switch with spring stationary electrode is proposed and fabricated by surface micromachining. The elastic contact process and stability performance are evaluated through experimental tests performed using a drop hammer. The test results show that the contact time...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-12-01
|
Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/18/12/4238 |
_version_ | 1828354143431950336 |
---|---|
author | Wenguo Chen Huiying Wang Dejian Kong Shulei Sun |
author_facet | Wenguo Chen Huiying Wang Dejian Kong Shulei Sun |
author_sort | Wenguo Chen |
collection | DOAJ |
description | A mechanical trigger inertial micro-switch with spring stationary electrode is proposed and fabricated by surface micromachining. The elastic contact process and stability performance are evaluated through experimental tests performed using a drop hammer. The test results show that the contact time is about 110 μs and 100 μs when the threshold acceleration is 480 g and the overload acceleration is 602 g, respectively. The vibration process of the electrodes is explained through an established physical mode. The elastic contact process is analyzed and discussed by Finite Element Analysis (FEA) simulations, which indicated that the contact time is about 65 μs when the threshold acceleration is 600 g. At the same time, this result also proved that the contact time could be extended effectively by the designed spring stationary electrode. The overload acceleration (800 g) has been applied to the Finite-Element model in ANSYS, the contact process indicated that the proof mass contacted with stationary electrode three times, and there was no bounce phenomenon during contact process, which fully proved that the stable contact process can be realized at high acceleration owing to the designed elastic stationary electrode. |
first_indexed | 2024-04-14T02:19:56Z |
format | Article |
id | doaj.art-8021a78b1ccd4fa1a64dd639d5d49a49 |
institution | Directory Open Access Journal |
issn | 1424-8220 |
language | English |
last_indexed | 2024-04-14T02:19:56Z |
publishDate | 2018-12-01 |
publisher | MDPI AG |
record_format | Article |
series | Sensors |
spelling | doaj.art-8021a78b1ccd4fa1a64dd639d5d49a492022-12-22T02:18:05ZengMDPI AGSensors1424-82202018-12-011812423810.3390/s18124238s18124238The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary ElectrodeWenguo Chen0Huiying Wang1Dejian Kong2Shulei Sun3The School of Information Engineering, Qujing Normal University, Qujing, Yunnan 655000, ChinaThe School of Information Engineering, Qujing Normal University, Qujing, Yunnan 655000, ChinaThe School of Information Engineering, Qujing Normal University, Qujing, Yunnan 655000, ChinaThe School of Mechanical Engineering, Guizhou Institute of Technology, Guiyang, Guizhou 550003, ChinaA mechanical trigger inertial micro-switch with spring stationary electrode is proposed and fabricated by surface micromachining. The elastic contact process and stability performance are evaluated through experimental tests performed using a drop hammer. The test results show that the contact time is about 110 μs and 100 μs when the threshold acceleration is 480 g and the overload acceleration is 602 g, respectively. The vibration process of the electrodes is explained through an established physical mode. The elastic contact process is analyzed and discussed by Finite Element Analysis (FEA) simulations, which indicated that the contact time is about 65 μs when the threshold acceleration is 600 g. At the same time, this result also proved that the contact time could be extended effectively by the designed spring stationary electrode. The overload acceleration (800 g) has been applied to the Finite-Element model in ANSYS, the contact process indicated that the proof mass contacted with stationary electrode three times, and there was no bounce phenomenon during contact process, which fully proved that the stable contact process can be realized at high acceleration owing to the designed elastic stationary electrode.https://www.mdpi.com/1424-8220/18/12/4238MEMSinertial micro-switchsurface micromachiningcontact timespring stationary electrode |
spellingShingle | Wenguo Chen Huiying Wang Dejian Kong Shulei Sun The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode Sensors MEMS inertial micro-switch surface micromachining contact time spring stationary electrode |
title | The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode |
title_full | The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode |
title_fullStr | The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode |
title_full_unstemmed | The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode |
title_short | The Elastic Contact and Stability Analysis of an Inertial Micro-Switch with a Spring Stationary Electrode |
title_sort | elastic contact and stability analysis of an inertial micro switch with a spring stationary electrode |
topic | MEMS inertial micro-switch surface micromachining contact time spring stationary electrode |
url | https://www.mdpi.com/1424-8220/18/12/4238 |
work_keys_str_mv | AT wenguochen theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode AT huiyingwang theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode AT dejiankong theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode AT shuleisun theelasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode AT wenguochen elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode AT huiyingwang elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode AT dejiankong elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode AT shuleisun elasticcontactandstabilityanalysisofaninertialmicroswitchwithaspringstationaryelectrode |