Nonlinear dynamics of nanoelectromechanical cantilevers based on nanowire piezoresistive detection
The nonlinear dynamics of in-plane nanoelectromechanical cantilevers based on silicon nanowire piezoresistive detection is investigated using a comprehensive analytical model that remains valid up to large displacements in the case of electrostatic actuation. This multiphysics model takes into accou...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2012-07-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20120104007 |