Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibili...
| Үндсэн зохиолчид: | , |
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| Формат: | Өгүүллэг |
| Хэл сонгох: | English |
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MDPI AG
2020-03-01
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| Цуврал: | Micromachines |
| Нөхцлүүд: | |
| Онлайн хандалт: | https://www.mdpi.com/2072-666X/11/4/362 |
| _version_ | 1827719641893437440 |
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| author | Masaaki Hashimoto Yoshihiro Taguchi |
| author_facet | Masaaki Hashimoto Yoshihiro Taguchi |
| author_sort | Masaaki Hashimoto |
| collection | DOAJ |
| description | Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are strategically placed to generate large displacement. The freestanding electrothermal kirigami film with a 2 mm diameter and high fill factor is completely fabricated by careful stress control in the MEMS process. A 200 μm vertical displacement with 131 mW and a 20 Hz responsive frequency is experimentally demonstrated as a unique function of electrothermal kirigami film. The proposed design, fabrication process, and experimental test validate the proposed scanner’s feasibility and potential for large-displacement scanning with a high fill factor. |
| first_indexed | 2024-03-10T20:47:57Z |
| format | Article |
| id | doaj.art-8143ee76284d49d9866c5ccac376b923 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T20:47:57Z |
| publishDate | 2020-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-8143ee76284d49d9866c5ccac376b9232023-11-19T20:10:48ZengMDPI AGMicromachines2072-666X2020-03-0111436210.3390/mi11040362Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large DisplacementMasaaki Hashimoto0Yoshihiro Taguchi1School of Integrated Design Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama, JapanDepartment of System Design Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama, JapanLarge-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are strategically placed to generate large displacement. The freestanding electrothermal kirigami film with a 2 mm diameter and high fill factor is completely fabricated by careful stress control in the MEMS process. A 200 μm vertical displacement with 131 mW and a 20 Hz responsive frequency is experimentally demonstrated as a unique function of electrothermal kirigami film. The proposed design, fabrication process, and experimental test validate the proposed scanner’s feasibility and potential for large-displacement scanning with a high fill factor.https://www.mdpi.com/2072-666X/11/4/362electrothermal scannerkirigami filmlarge displacementmicroelectromechanical system (MEMS) |
| spellingShingle | Masaaki Hashimoto Yoshihiro Taguchi Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement Micromachines electrothermal scanner kirigami film large displacement microelectromechanical system (MEMS) |
| title | Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement |
| title_full | Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement |
| title_fullStr | Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement |
| title_full_unstemmed | Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement |
| title_short | Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement |
| title_sort | design and fabrication of a kirigami inspired electrothermal mems scanner with large displacement |
| topic | electrothermal scanner kirigami film large displacement microelectromechanical system (MEMS) |
| url | https://www.mdpi.com/2072-666X/11/4/362 |
| work_keys_str_mv | AT masaakihashimoto designandfabricationofakirigamiinspiredelectrothermalmemsscannerwithlargedisplacement AT yoshihirotaguchi designandfabricationofakirigamiinspiredelectrothermalmemsscannerwithlargedisplacement |