Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption
Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/19/1/188 |