High-performance ITO thin films for on-cell touch sensor of foldable OLED displays
ITO thin films must have good electro-optical and mechanical characteristics to use them as integrated touch sensors for flexible OLED displays. We fabricated ITO thin films on a separation-layer-coated glass substrate under various deposition or annealing conditions, and then transferred them to cy...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2021-11-01
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| Series: | Journal of Information Display |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/15980316.2021.1999867 |
| Summary: | ITO thin films must have good electro-optical and mechanical characteristics to use them as integrated touch sensors for flexible OLED displays. We fabricated ITO thin films on a separation-layer-coated glass substrate under various deposition or annealing conditions, and then transferred them to cyclo-olefin polymer films to evaluate their electro-optical and mechanical characteristics. ITO films with a thickness of approximately 136 nm deposited at 250°C showed a sheet resistance of 36 Ω/□, light transmittance of 88%, and 2.4% of elongation at break. The 136 nm thick ITO films deposited at 150 °C and transferred on 50 μm thick COP film survived 500 h of 85 °C, 85% relative humidity under 180-degree bending preservation test, endured at 200,000-time repetitive bending test with a curvature radius of 1.5 mm. These high-performance ITO thin films can be applied to fabricate on-cell touch sensors for foldable OLED displays. |
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| ISSN: | 1598-0316 2158-1606 |