Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†

Transition metal dichalcogenide (TDMCs) placed on a 3D semiconductor substrate haveleads to significant advances in the electronic industry with new opportunities based on 2D/3D heterojunction based diverse devices without any restrictions, such as lattice compatibility. In this study, magnetron spu...

Full description

Bibliographic Details
Main Authors: Merve Acar, Emre Gür, Mehmet Ertuğrul, Soheil Mobtakeri
Format: Article
Language:English
Published: Hitit University 2021-03-01
Series:Hittite Journal of Science and Engineering
Subjects:
Online Access:https://dergipark.org.tr/tr/download/article-file/1676223
_version_ 1797662654298324992
author Merve Acar
Emre Gür
Mehmet Ertuğrul
Soheil Mobtakeri
author_facet Merve Acar
Emre Gür
Mehmet Ertuğrul
Soheil Mobtakeri
author_sort Merve Acar
collection DOAJ
description Transition metal dichalcogenide (TDMCs) placed on a 3D semiconductor substrate haveleads to significant advances in the electronic industry with new opportunities based on 2D/3D heterojunction based diverse devices without any restrictions, such as lattice compatibility. In this study, magnetron sputtering technique was used to grow layered tungsten disulfide (WS2) thin films onto p-Si and thus WS2/p-Si heterojunctions were created. The structural and chemical parameters of this sputtered WS2 films were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Electrical characterization of WS2/p-Si heterojunction was also obtained to investigate Log (I)-V and linear I-V characteristics. A typical diode like I-V behavior was observed with a five-ordered rectifying ratio. It was observed that the heterojunction has a barrier height of 0.48 eV, the leakage current at -0.2 V is 2.25×10-6 A and the ideality factor is 5.7. This work show that single step magnetron sputtering WS2/p-Si heterojunction has great importance for heterojunction based future nanoelectronic devices.
first_indexed 2024-03-11T19:03:27Z
format Article
id doaj.art-82cbb0a30baa493889c54ed2bee8b8fe
institution Directory Open Access Journal
issn 2148-4171
language English
last_indexed 2024-03-11T19:03:27Z
publishDate 2021-03-01
publisher Hitit University
record_format Article
series Hittite Journal of Science and Engineering
spelling doaj.art-82cbb0a30baa493889c54ed2bee8b8fe2023-10-10T11:17:28ZengHitit UniversityHittite Journal of Science and Engineering2148-41712021-03-01811510.17350/HJSE19030000206150Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†Merve Acar0Emre Gür1Mehmet Ertuğrul2Soheil Mobtakeri3Atatürk UnviersityAtatürk UniversityAtatürk UniversityAtatürk UniversityTransition metal dichalcogenide (TDMCs) placed on a 3D semiconductor substrate haveleads to significant advances in the electronic industry with new opportunities based on 2D/3D heterojunction based diverse devices without any restrictions, such as lattice compatibility. In this study, magnetron sputtering technique was used to grow layered tungsten disulfide (WS2) thin films onto p-Si and thus WS2/p-Si heterojunctions were created. The structural and chemical parameters of this sputtered WS2 films were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Electrical characterization of WS2/p-Si heterojunction was also obtained to investigate Log (I)-V and linear I-V characteristics. A typical diode like I-V behavior was observed with a five-ordered rectifying ratio. It was observed that the heterojunction has a barrier height of 0.48 eV, the leakage current at -0.2 V is 2.25×10-6 A and the ideality factor is 5.7. This work show that single step magnetron sputtering WS2/p-Si heterojunction has great importance for heterojunction based future nanoelectronic devices.https://dergipark.org.tr/tr/download/article-file/16762232d materialstmdcws22d/3d heterojunctions
spellingShingle Merve Acar
Emre Gür
Mehmet Ertuğrul
Soheil Mobtakeri
Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†
Hittite Journal of Science and Engineering
2d materials
tmdc
ws2
2d/3d heterojunctions
title Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†
title_full Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†
title_fullStr Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†
title_full_unstemmed Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†
title_short Fabrication and Analysis Of 2D/3D Heterojunction Between Continuous Few-layer WS2 Film and Si (100)†
title_sort fabrication and analysis of 2d 3d heterojunction between continuous few layer ws2 film and si 100 †
topic 2d materials
tmdc
ws2
2d/3d heterojunctions
url https://dergipark.org.tr/tr/download/article-file/1676223
work_keys_str_mv AT merveacar fabricationandanalysisof2d3dheterojunctionbetweencontinuousfewlayerws2filmandsi100
AT emregur fabricationandanalysisof2d3dheterojunctionbetweencontinuousfewlayerws2filmandsi100
AT mehmetertugrul fabricationandanalysisof2d3dheterojunctionbetweencontinuousfewlayerws2filmandsi100
AT soheilmobtakeri fabricationandanalysisof2d3dheterojunctionbetweencontinuousfewlayerws2filmandsi100