State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications
This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various ap...
| Main Authors: | , , , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-03-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/11/3/253 |
| _version_ | 1827305256498757632 |
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| author | Shujie Liu Philipp Kästner Roland Donatiello Anup Shrivastava Marek Smolarczyk Mustaqim Siddi Que Iskhandar Md Kamrul Hasan Giuseppe Caruso Jiahao Chen Basma Elsaka Shilby Baby Dennis Löber Thomas Kusserow Jost Adam Hartmut Hillmer |
| author_facet | Shujie Liu Philipp Kästner Roland Donatiello Anup Shrivastava Marek Smolarczyk Mustaqim Siddi Que Iskhandar Md Kamrul Hasan Giuseppe Caruso Jiahao Chen Basma Elsaka Shilby Baby Dennis Löber Thomas Kusserow Jost Adam Hartmut Hillmer |
| author_sort | Shujie Liu |
| collection | DOAJ |
| description | This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology. |
| first_indexed | 2024-04-24T17:55:09Z |
| format | Article |
| id | doaj.art-82d546093fa04711b4aacefb35cb7f87 |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-04-24T17:55:09Z |
| publishDate | 2024-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj.art-82d546093fa04711b4aacefb35cb7f872024-03-27T14:00:10ZengMDPI AGPhotonics2304-67322024-03-0111325310.3390/photonics11030253State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic ApplicationsShujie Liu0Philipp Kästner1Roland Donatiello2Anup Shrivastava3Marek Smolarczyk4Mustaqim Siddi Que Iskhandar5Md Kamrul Hasan6Giuseppe Caruso7Jiahao Chen8Basma Elsaka9Shilby Baby10Dennis Löber11Thomas Kusserow12Jost Adam13Hartmut Hillmer14Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyComputational Materials and Photonics Department, University of Kassel, Wilhelmshöher Allee 71, 34121 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyCARUSO & FREELAND GmbH, Neusatz-Straße 10, 8212 Neuhausen, SwitzerlandInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyOptoelectronics Department, Technical Faculty, Friedrich-Alexander-University, Konrad-Zuse-Straße 3/5, 91052 Erlangen, GermanyComputational Materials and Photonics Department, University of Kassel, Wilhelmshöher Allee 71, 34121 Kassel, GermanyInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department, University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, GermanyThis work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology.https://www.mdpi.com/2304-6732/11/3/253smart glasssensoricssafetymetallic mirrorsdielectric mirrorssemiconductor mirrors |
| spellingShingle | Shujie Liu Philipp Kästner Roland Donatiello Anup Shrivastava Marek Smolarczyk Mustaqim Siddi Que Iskhandar Md Kamrul Hasan Giuseppe Caruso Jiahao Chen Basma Elsaka Shilby Baby Dennis Löber Thomas Kusserow Jost Adam Hartmut Hillmer State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications Photonics smart glass sensorics safety metallic mirrors dielectric mirrors semiconductor mirrors |
| title | State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications |
| title_full | State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications |
| title_fullStr | State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications |
| title_full_unstemmed | State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications |
| title_short | State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications |
| title_sort | state of the art materials used in mems micromirror arrays for photonic applications |
| topic | smart glass sensorics safety metallic mirrors dielectric mirrors semiconductor mirrors |
| url | https://www.mdpi.com/2304-6732/11/3/253 |
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