State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various ap...

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Bibliographic Details
Main Authors: Shujie Liu, Philipp Kästner, Roland Donatiello, Anup Shrivastava, Marek Smolarczyk, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Giuseppe Caruso, Jiahao Chen, Basma Elsaka, Shilby Baby, Dennis Löber, Thomas Kusserow, Jost Adam, Hartmut Hillmer
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Photonics
Subjects:
smart glass
sensorics
safety
metallic mirrors
dielectric mirrors
semiconductor mirrors
Online Access:https://www.mdpi.com/2304-6732/11/3/253

Internet

https://www.mdpi.com/2304-6732/11/3/253

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