Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications
We fabricated a gas sensor with a wide-bandgap ZnGa<sub>2</sub>O<sub>4</sub> (ZGO) epilayer grown on a sapphire substrate by metalorganic chemical vapor deposition. The ZGO presented (111), (222) and (333) phases demonstrated by an X-ray diffraction system. The related materi...
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MDPI AG
2022-10-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/12/21/3759 |
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| author | Ray-Hua Horng Shu-Hsien Lin Dun-Ru Hung Po-Hsiang Chao Pin-Kuei Fu Cheng-Hsu Chen Yi-Che Chen Jhih-Hong Shao Chiung-Yi Huang Fu-Gow Tarntair Po-Liang Liu Ching-Lien Hsiao |
| author_facet | Ray-Hua Horng Shu-Hsien Lin Dun-Ru Hung Po-Hsiang Chao Pin-Kuei Fu Cheng-Hsu Chen Yi-Che Chen Jhih-Hong Shao Chiung-Yi Huang Fu-Gow Tarntair Po-Liang Liu Ching-Lien Hsiao |
| author_sort | Ray-Hua Horng |
| collection | DOAJ |
| description | We fabricated a gas sensor with a wide-bandgap ZnGa<sub>2</sub>O<sub>4</sub> (ZGO) epilayer grown on a sapphire substrate by metalorganic chemical vapor deposition. The ZGO presented (111), (222) and (333) phases demonstrated by an X-ray diffraction system. The related material characteristics were also measured by scanning electron microscopy, transmission electron microscopy and X-ray photoelectron spectroscopy. This ZGO gas sensor was used to detect nitric oxide (NO) in the parts-per-billion range. In this study, the structure effect on the response of the NO gas sensor was studied by altering the sensor dimensions. Two approaches were adopted to prove the dimension effect on the sensing mechanism. In the first approach, the sensing area of the sensors was kept constant while both channel length (L) and width (W) were varied with designed dimensions (L × W) of 60 × 200, 80 × 150, and 120 ×100 μm<sup>2</sup>. In the second, the dimensions of the sensing area were altered (60, 40, and 20 μm) with W kept constant. The performance of the sensors was studied with varying gas concentrations in the range of 500 ppb~10 ppm. The sensor with dimensions of 20 × 200 μm<sup>2</sup> exhibited a high response of 11.647 in 10 ppm, and 1.05 in 10 ppb for NO gas. The sensor with a longer width and shorter channel length exhibited the best response. The sensing mechanism was provided to explain the above phenomena. Furthermore, the reaction between NO and the sensor surface was simulated by O exposure of the ZGO surface in air and calculated by first principles. |
| first_indexed | 2024-03-09T18:47:07Z |
| format | Article |
| id | doaj.art-84a858720e4a4fcc95aebba14e2eb07a |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-09T18:47:07Z |
| publishDate | 2022-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-84a858720e4a4fcc95aebba14e2eb07a2023-11-24T06:08:41ZengMDPI AGNanomaterials2079-49912022-10-011221375910.3390/nano12213759Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide ApplicationsRay-Hua Horng0Shu-Hsien Lin1Dun-Ru Hung2Po-Hsiang Chao3Pin-Kuei Fu4Cheng-Hsu Chen5Yi-Che Chen6Jhih-Hong Shao7Chiung-Yi Huang8Fu-Gow Tarntair9Po-Liang Liu10Ching-Lien Hsiao11Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University, Taichung 402, TaiwanInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Post-Baccalaureate Medicine, College of Medicine, National Chung Hsing University, Taichung 402010, TaiwanDepartment of Post-Baccalaureate Medicine, College of Medicine, National Chung Hsing University, Taichung 402010, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University, Taichung 402, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University, Taichung 402, TaiwanInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanGraduate Institute of Precision Engineering, National Chung Hsing University, Taichung 402, TaiwanThin Film Physics Division, Department of Physics, Chemistry, and Biology, Linköping University, 58183 Linköping, SwedenWe fabricated a gas sensor with a wide-bandgap ZnGa<sub>2</sub>O<sub>4</sub> (ZGO) epilayer grown on a sapphire substrate by metalorganic chemical vapor deposition. The ZGO presented (111), (222) and (333) phases demonstrated by an X-ray diffraction system. The related material characteristics were also measured by scanning electron microscopy, transmission electron microscopy and X-ray photoelectron spectroscopy. This ZGO gas sensor was used to detect nitric oxide (NO) in the parts-per-billion range. In this study, the structure effect on the response of the NO gas sensor was studied by altering the sensor dimensions. Two approaches were adopted to prove the dimension effect on the sensing mechanism. In the first approach, the sensing area of the sensors was kept constant while both channel length (L) and width (W) were varied with designed dimensions (L × W) of 60 × 200, 80 × 150, and 120 ×100 μm<sup>2</sup>. In the second, the dimensions of the sensing area were altered (60, 40, and 20 μm) with W kept constant. The performance of the sensors was studied with varying gas concentrations in the range of 500 ppb~10 ppm. The sensor with dimensions of 20 × 200 μm<sup>2</sup> exhibited a high response of 11.647 in 10 ppm, and 1.05 in 10 ppb for NO gas. The sensor with a longer width and shorter channel length exhibited the best response. The sensing mechanism was provided to explain the above phenomena. Furthermore, the reaction between NO and the sensor surface was simulated by O exposure of the ZGO surface in air and calculated by first principles.https://www.mdpi.com/2079-4991/12/21/3759NO gas sensorZnGa<sub>2</sub>O<sub>4</sub>responsefirst-principles calculation |
| spellingShingle | Ray-Hua Horng Shu-Hsien Lin Dun-Ru Hung Po-Hsiang Chao Pin-Kuei Fu Cheng-Hsu Chen Yi-Che Chen Jhih-Hong Shao Chiung-Yi Huang Fu-Gow Tarntair Po-Liang Liu Ching-Lien Hsiao Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications Nanomaterials NO gas sensor ZnGa<sub>2</sub>O<sub>4</sub> response first-principles calculation |
| title | Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications |
| title_full | Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications |
| title_fullStr | Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications |
| title_full_unstemmed | Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications |
| title_short | Structure Effect on the Response of ZnGa<sub>2</sub>O<sub>4</sub> Gas Sensor for Nitric Oxide Applications |
| title_sort | structure effect on the response of znga sub 2 sub o sub 4 sub gas sensor for nitric oxide applications |
| topic | NO gas sensor ZnGa<sub>2</sub>O<sub>4</sub> response first-principles calculation |
| url | https://www.mdpi.com/2079-4991/12/21/3759 |
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