| Summary: | Bound states in the continuum (BIC)-based all-silicon metasurfaces have attracted widespread attention in recent years because of their high quality (Q) factors in terahertz (THz) frequencies. Here, we propose and experimentally demonstrate an all-silicon BIC metasurface consisting of an air-hole array on a Si substrate. BICs originated from low-order TE and TM guided mode resonances (GMRs) induced by (1,0) and (1,1) Rayleigh diffraction of metagratings, which were numerically investigated. The results indicate that the GMRs and their Q-factors are easily excited and manipulated by breaking the lattice symmetry through changes in the position or radius of the air-holes, while the resonance frequencies are less sensitive to these changes. The measured Q-factor of the GMRs is as high as 490. The high-Q metasurfaces have potential applications in THz modulators, biosensors, and other photonic devices.
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