Heat accumulation effect during CO2 laser processing of fused silica optics
The intrinsic heat-affected zone (HAZ) during the microsecond pulsed laser processing significantly affect the surface quality of the fused silica optics. This study employed both three-dimensional numerical simulations and experiments to analyze the heat accumulation effect, morphology evolution me...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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Elsevier
2022-03-01
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| Series: | Results in Physics |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379722000948 |
| _version_ | 1818986976678772736 |
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| author | Chao Tan Linjie Zhao Mingjun Chen Jian Cheng Yu Zhang Jiong Zhang Zhiyuan Yan |
| author_facet | Chao Tan Linjie Zhao Mingjun Chen Jian Cheng Yu Zhang Jiong Zhang Zhiyuan Yan |
| author_sort | Chao Tan |
| collection | DOAJ |
| description | The intrinsic heat-affected zone (HAZ) during the microsecond pulsed laser processing significantly affect the surface quality of the fused silica optics. This study employed both three-dimensional numerical simulations and experiments to analyze the heat accumulation effect, morphology evolution mechanism, and the HAZ distribution during CO2 laser processing of fused silica. Simulation results show that with the increases of process parameters such as the laser frequency, the overlap rate, and the pulse width, the residual temperature of the substrate rises gradually. The excessive laser repetition frequency mainly causes the heat accumulation and over-ablation. Analysis of the laser processed surface demonstrates that the superposition of the laser spot energy results in the periodic texture whose spatial internal is equal to the feeding distance of the laser spot. Increasing the track pitch will make the ridges and grooves of the ripple structure discrete, while reducing the laser moving speed within a certain range can improve the surface quality. Besides, the fictive temperature of the substrate tends to stabilize after the third laser pulse in each track. The thickness of the HAZ is close to the material removal depth, but it can be effectively suppressed with a pulse width less than 10 μs. Experiments are conducted to validate the simulation and the results match well with each. This study can provide a theoretical guidance for producing high-quality fused silica optics in high-power laser device applications. |
| first_indexed | 2024-12-20T18:59:21Z |
| format | Article |
| id | doaj.art-85e2bfc5839d45149e401c2a4a14f0eb |
| institution | Directory Open Access Journal |
| issn | 2211-3797 |
| language | English |
| last_indexed | 2024-12-20T18:59:21Z |
| publishDate | 2022-03-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Results in Physics |
| spelling | doaj.art-85e2bfc5839d45149e401c2a4a14f0eb2022-12-21T19:29:26ZengElsevierResults in Physics2211-37972022-03-0134105308Heat accumulation effect during CO2 laser processing of fused silica opticsChao Tan0Linjie Zhao1Mingjun Chen2Jian Cheng3Yu Zhang4Jiong Zhang5Zhiyuan Yan6State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China; Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575, SingaporeState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, ChinaState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, ChinaState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China; Corresponding author.Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575, SingaporeDepartment of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575, SingaporeDepartment of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117583, SingaporeThe intrinsic heat-affected zone (HAZ) during the microsecond pulsed laser processing significantly affect the surface quality of the fused silica optics. This study employed both three-dimensional numerical simulations and experiments to analyze the heat accumulation effect, morphology evolution mechanism, and the HAZ distribution during CO2 laser processing of fused silica. Simulation results show that with the increases of process parameters such as the laser frequency, the overlap rate, and the pulse width, the residual temperature of the substrate rises gradually. The excessive laser repetition frequency mainly causes the heat accumulation and over-ablation. Analysis of the laser processed surface demonstrates that the superposition of the laser spot energy results in the periodic texture whose spatial internal is equal to the feeding distance of the laser spot. Increasing the track pitch will make the ridges and grooves of the ripple structure discrete, while reducing the laser moving speed within a certain range can improve the surface quality. Besides, the fictive temperature of the substrate tends to stabilize after the third laser pulse in each track. The thickness of the HAZ is close to the material removal depth, but it can be effectively suppressed with a pulse width less than 10 μs. Experiments are conducted to validate the simulation and the results match well with each. This study can provide a theoretical guidance for producing high-quality fused silica optics in high-power laser device applications.http://www.sciencedirect.com/science/article/pii/S2211379722000948Fused silicaStructural relaxationHeat accumulationHeat-affected zoneLaser processing |
| spellingShingle | Chao Tan Linjie Zhao Mingjun Chen Jian Cheng Yu Zhang Jiong Zhang Zhiyuan Yan Heat accumulation effect during CO2 laser processing of fused silica optics Results in Physics Fused silica Structural relaxation Heat accumulation Heat-affected zone Laser processing |
| title | Heat accumulation effect during CO2 laser processing of fused silica optics |
| title_full | Heat accumulation effect during CO2 laser processing of fused silica optics |
| title_fullStr | Heat accumulation effect during CO2 laser processing of fused silica optics |
| title_full_unstemmed | Heat accumulation effect during CO2 laser processing of fused silica optics |
| title_short | Heat accumulation effect during CO2 laser processing of fused silica optics |
| title_sort | heat accumulation effect during co2 laser processing of fused silica optics |
| topic | Fused silica Structural relaxation Heat accumulation Heat-affected zone Laser processing |
| url | http://www.sciencedirect.com/science/article/pii/S2211379722000948 |
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