3D Conformal Fabrication of Piezoceramic Films

Abstract Piezoceramic films are an essential class of energy‐conversion materials that have been widely used in the electronics industry. Although current methods create a great freedom for fabricating high‐quality piezoceramic films, it requires well‐controlled synthesis conditions, including speci...

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Main Authors: Shiyuan Liu, Yao Shan, Ying Hong, Yuankai Jin, Weikang Lin, Zhuomin Zhang, Xiaote Xu, Zuankai Wang, Zhengbao Yang
Format: Article
Language:English
Published: Wiley 2022-06-01
Series:Advanced Science
Subjects:
Online Access:https://doi.org/10.1002/advs.202106030
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author Shiyuan Liu
Yao Shan
Ying Hong
Yuankai Jin
Weikang Lin
Zhuomin Zhang
Xiaote Xu
Zuankai Wang
Zhengbao Yang
author_facet Shiyuan Liu
Yao Shan
Ying Hong
Yuankai Jin
Weikang Lin
Zhuomin Zhang
Xiaote Xu
Zuankai Wang
Zhengbao Yang
author_sort Shiyuan Liu
collection DOAJ
description Abstract Piezoceramic films are an essential class of energy‐conversion materials that have been widely used in the electronics industry. Although current methods create a great freedom for fabricating high‐quality piezoceramic films, it requires well‐controlled synthesis conditions, including special high‐cost equipment and planar substrates particularly. The limited substrate selections hinder the applications of piezoceramic films in 3D conformal structures where most objects possess complex curvilinear surfaces. To overcome such limitations, a fast, energy‐efficient, and cost‐effective approach, named flame treated spray (FTS) coating, is developed for preparing piezoceramic films on free‐form surfaces. The flame treatment significantly enhances the hydrophilicity of a substrate, assisting in forming a uniform and continuous thin film. The followed spray coating deposits hundreds of nanometers to several micrometers thick films on 3D free‐form surfaces. Given the size controllability and arbitrary surface compatibility of the FTS method, a highly conformal piezoelectric tactile sensor array (4 × 4) is assembled on a spherical surface for mimicking robot fingers and an on‐site thin‐film sensor on the wing of an aircraft model to monitor the vibration in real‐time during flight. The FTS film deposition offers a highly promising methodology for the application of functional thin‐film from micro‐ to marcoscale devices, regardless of conformal problems.
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spelling doaj.art-85ef29976e0c463cb807a9df59a73d432022-12-22T00:17:34ZengWileyAdvanced Science2198-38442022-06-01918n/an/a10.1002/advs.2021060303D Conformal Fabrication of Piezoceramic FilmsShiyuan Liu0Yao Shan1Ying Hong2Yuankai Jin3Weikang Lin4Zhuomin Zhang5Xiaote Xu6Zuankai Wang7Zhengbao Yang8Department of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaDepartment of Mechanical Engineering City University of Hong Kong Hong Kong ChinaAbstract Piezoceramic films are an essential class of energy‐conversion materials that have been widely used in the electronics industry. Although current methods create a great freedom for fabricating high‐quality piezoceramic films, it requires well‐controlled synthesis conditions, including special high‐cost equipment and planar substrates particularly. The limited substrate selections hinder the applications of piezoceramic films in 3D conformal structures where most objects possess complex curvilinear surfaces. To overcome such limitations, a fast, energy‐efficient, and cost‐effective approach, named flame treated spray (FTS) coating, is developed for preparing piezoceramic films on free‐form surfaces. The flame treatment significantly enhances the hydrophilicity of a substrate, assisting in forming a uniform and continuous thin film. The followed spray coating deposits hundreds of nanometers to several micrometers thick films on 3D free‐form surfaces. Given the size controllability and arbitrary surface compatibility of the FTS method, a highly conformal piezoelectric tactile sensor array (4 × 4) is assembled on a spherical surface for mimicking robot fingers and an on‐site thin‐film sensor on the wing of an aircraft model to monitor the vibration in real‐time during flight. The FTS film deposition offers a highly promising methodology for the application of functional thin‐film from micro‐ to marcoscale devices, regardless of conformal problems.https://doi.org/10.1002/advs.202106030conformal ceramic filmsenergy harvestersstructural health monitoringtactile sensor arraysvibration sensors
spellingShingle Shiyuan Liu
Yao Shan
Ying Hong
Yuankai Jin
Weikang Lin
Zhuomin Zhang
Xiaote Xu
Zuankai Wang
Zhengbao Yang
3D Conformal Fabrication of Piezoceramic Films
Advanced Science
conformal ceramic films
energy harvesters
structural health monitoring
tactile sensor arrays
vibration sensors
title 3D Conformal Fabrication of Piezoceramic Films
title_full 3D Conformal Fabrication of Piezoceramic Films
title_fullStr 3D Conformal Fabrication of Piezoceramic Films
title_full_unstemmed 3D Conformal Fabrication of Piezoceramic Films
title_short 3D Conformal Fabrication of Piezoceramic Films
title_sort 3d conformal fabrication of piezoceramic films
topic conformal ceramic films
energy harvesters
structural health monitoring
tactile sensor arrays
vibration sensors
url https://doi.org/10.1002/advs.202106030
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