Recent Progress in Computational Materials Science for Semiconductor Epitaxial Growth
Recent progress in computational materials science in the area of semiconductor epitaxial growth is reviewed. Reliable prediction can now be made for a wide range of problems, such as surface reconstructions, adsorption-desorption behavior, and growth processes at realistic growth conditions, using...
Main Authors: | Tomonori Ito, Toru Akiyama |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-02-01
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Series: | Crystals |
Subjects: | |
Online Access: | http://www.mdpi.com/2073-4352/7/2/46 |
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