Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition
Due to the precursor gas flow in the focused ion beam induced deposition process, a shadow effect appears behind the shading structures. This article carries out experiments with phenanthrene as the precursor gas and establishes a numerical model to define the shadow area and estimate the intensity...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/12/6/905 |