Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers
Au-based micro-electro-mechanical-system (Au-MEMS) capacitance accelerometers show high sensitivity by suppressing the mechanical noise because of the high mass density of gold (ρ = 19.3 g/cm3). On the other hand, their long-term reliability suffers from drift phenomena induced by the impurities inc...
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| Format: | Article |
| Language: | English |
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Elsevier
2023-12-01
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| Series: | Micro and Nano Engineering |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007223000564 |
| _version_ | 1797405372713009152 |
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| author | Takumi Akiyama Tomoyuki Kurioka Chun-Yi Chen Tso-Fu Mark Chang Parthojit Chakraborty Katsuyuki Machida Hiroyuki Ito Yoshihiro Miyake Masato Sone |
| author_facet | Takumi Akiyama Tomoyuki Kurioka Chun-Yi Chen Tso-Fu Mark Chang Parthojit Chakraborty Katsuyuki Machida Hiroyuki Ito Yoshihiro Miyake Masato Sone |
| author_sort | Takumi Akiyama |
| collection | DOAJ |
| description | Au-based micro-electro-mechanical-system (Au-MEMS) capacitance accelerometers show high sensitivity by suppressing the mechanical noise because of the high mass density of gold (ρ = 19.3 g/cm3). On the other hand, their long-term reliability suffers from drift phenomena induced by the impurities incorporated in the key component during their fabrication process, such as the gold electroplating step. Herein, impurities in electroplated Au-based components for MEMS capacitive accelerometers are evaluated by thermal desorption spectrometry (TDS) measurements. The TDS measurement reveals that dominant desorption gases from the Au-based component are molecular hydrogen (H2) and water (H2O). These desorption gases are derived from impurities in the electroplated Au-based component, and the amount of these gases is significantly suppressed by a thermal treatment step. In conclusion, this study demonstrates that the electroplated Au-based component contains impurities originated from the fabrication process, and these impurities could be removed by a thermal treatment step. |
| first_indexed | 2024-03-09T03:09:07Z |
| format | Article |
| id | doaj.art-869d1c2ae1554843ba8041be420b001e |
| institution | Directory Open Access Journal |
| issn | 2590-0072 |
| language | English |
| last_indexed | 2024-03-09T03:09:07Z |
| publishDate | 2023-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Micro and Nano Engineering |
| spelling | doaj.art-869d1c2ae1554843ba8041be420b001e2023-12-04T05:23:58ZengElsevierMicro and Nano Engineering2590-00722023-12-0121100226Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometersTakumi Akiyama0Tomoyuki Kurioka1Chun-Yi Chen2Tso-Fu Mark Chang3Parthojit Chakraborty4Katsuyuki Machida5Hiroyuki Ito6Yoshihiro Miyake7Masato Sone8Institute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, JapanInstitute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, Japan; Corresponding author.Institute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, JapanInstitute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, JapanInstitute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, JapanInstitute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, JapanInstitute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, JapanDepartment of Computer Science, Tokyo Institute of Technology, Yokohama 226-8503, JapanInstitute of Innovative Research, Tokyo Institute of Technology, Yokohama 226-8503, JapanAu-based micro-electro-mechanical-system (Au-MEMS) capacitance accelerometers show high sensitivity by suppressing the mechanical noise because of the high mass density of gold (ρ = 19.3 g/cm3). On the other hand, their long-term reliability suffers from drift phenomena induced by the impurities incorporated in the key component during their fabrication process, such as the gold electroplating step. Herein, impurities in electroplated Au-based components for MEMS capacitive accelerometers are evaluated by thermal desorption spectrometry (TDS) measurements. The TDS measurement reveals that dominant desorption gases from the Au-based component are molecular hydrogen (H2) and water (H2O). These desorption gases are derived from impurities in the electroplated Au-based component, and the amount of these gases is significantly suppressed by a thermal treatment step. In conclusion, this study demonstrates that the electroplated Au-based component contains impurities originated from the fabrication process, and these impurities could be removed by a thermal treatment step.http://www.sciencedirect.com/science/article/pii/S2590007223000564Thermal desorption spectroscopyElectroplated goldImpurity analysisThermal treatmentMEMS capacitive accelerometers |
| spellingShingle | Takumi Akiyama Tomoyuki Kurioka Chun-Yi Chen Tso-Fu Mark Chang Parthojit Chakraborty Katsuyuki Machida Hiroyuki Ito Yoshihiro Miyake Masato Sone Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers Micro and Nano Engineering Thermal desorption spectroscopy Electroplated gold Impurity analysis Thermal treatment MEMS capacitive accelerometers |
| title | Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers |
| title_full | Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers |
| title_fullStr | Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers |
| title_full_unstemmed | Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers |
| title_short | Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers |
| title_sort | impurity analysis of electroplated gold components with multi layered structures by thermal desorption spectrometry toward application in gold micro electro mechanical system capacitive accelerometers |
| topic | Thermal desorption spectroscopy Electroplated gold Impurity analysis Thermal treatment MEMS capacitive accelerometers |
| url | http://www.sciencedirect.com/science/article/pii/S2590007223000564 |
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