Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers

Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers

Au-based micro-electro-mechanical-system (Au-MEMS) capacitance accelerometers show high sensitivity by suppressing the mechanical noise because of the high mass density of gold (ρ = 19.3 g/cm3). On the other hand, their long-term reliability suffers from drift phenomena induced by the impurities inc...

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Bibliographic Details
Main Authors: Takumi Akiyama, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone
Format: Article
Language:English
Published: Elsevier 2023-12-01
Series:Micro and Nano Engineering
Subjects:
Thermal desorption spectroscopy
Electroplated gold
Impurity analysis
Thermal treatment
MEMS capacitive accelerometers
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007223000564

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