The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes

The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes

In this paper, we develop a new approach in order to understand the origin of the quadrature error in MEMS gyroscopes. As the width of the flexure springs is a critical parameter in the MEMS design, it is necessary to investigate the impact of the width variations on the stiffness coupling, which ca...

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Bibliographic Details
Main Authors: Alexandre Azier, Najib Kacem, Bernard Chaumet, Noureddine Bouhaddi
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
MEMS
gyroscope
inertial sensor
quadrature signal
technology defects
Online Access:https://www.mdpi.com/2072-666X/13/5/655

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