MIS-Like Structures with Silicon-Rich Oxide Films Obtained by HFCVD: Their Response as Photodetectors

MIS-Like Structures with Silicon-Rich Oxide Films Obtained by HFCVD: Their Response as Photodetectors

MIS-type structures composed of silicon-rich oxide (SRO), thin films deposited by hot filament chemical vapor deposition (HFCVD), show interesting I-V and I-t properties under white light illumination and a response as photodetectors. From electrical measurements, it was found that at a reverse bias...

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Bibliographic Details
Main Authors: Gabriel Omar Mendoza Conde, José Alberto Luna López, Zaira Jocelyn Hernández Simón, José Álvaro David Hernández de la Luz, Godofredo García Salgado, Erick Gastellou Hernández, Haydee Patricia Martínez Hernández, Javier Flores Méndez
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Sensors
Subjects:
SRO films
HFCVD
photodetector
responsivity
Online Access:https://www.mdpi.com/1424-8220/22/10/3904

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