oneM2M-Enabled Prediction of High Particulate Matter Data Based on Multi-Dense Layer BiLSTM Model
High particulate matter (PM) concentrations in the cleanroom semiconductor factory have become a significant concern as they can damage electronic devices during the manufacturing process. PM can be predicted before becoming more concentrated based on its historical data to support factory managemen...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-02-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/12/4/2260 |