oneM2M-Enabled Prediction of High Particulate Matter Data Based on Multi-Dense Layer BiLSTM Model
High particulate matter (PM) concentrations in the cleanroom semiconductor factory have become a significant concern as they can damage electronic devices during the manufacturing process. PM can be predicted before becoming more concentrated based on its historical data to support factory managemen...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-02-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/4/2260 |