Can ZrAlN thin films be used as thermistor sensors for temperature assessment?

Can ZrAlN thin films be used as thermistor sensors for temperature assessment?

The electrical characteristics and conduction mechanisms of ZrAlN thin films for their potential use as thermistor sensors were assessed. Various compositions of Zr1-xAlxN were synthesized by sputtering and studied up to 200 °C to understand their sensitivity and applicability. Among the composition...

Ausführliche Beschreibung

Bibliographische Detailangaben
Hauptverfasser:	Bruno Martins, Carlos Patacas, Albano Cavaleiro, Pedro Faia, Oleksandr Bondarchuk, Filipe Fernandes
Format:	Artikel
Sprache:	English
Veröffentlicht:	Elsevier 2024-06-01
Schriftenreihe:	Journal of Science: Advanced Materials and Devices
Schlagworte:	NTC thin-film thermistor Reactive sputtering Nitride semiconductors Impedance spectroscopy Temperature sensing
Online Zugang:	http://www.sciencedirect.com/science/article/pii/S2468217924000078

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