Can ZrAlN thin films be used as thermistor sensors for temperature assessment?

Can ZrAlN thin films be used as thermistor sensors for temperature assessment?

The electrical characteristics and conduction mechanisms of ZrAlN thin films for their potential use as thermistor sensors were assessed. Various compositions of Zr1-xAlxN were synthesized by sputtering and studied up to 200 °C to understand their sensitivity and applicability. Among the composition...

書誌詳細
主要な著者:	Bruno Martins, Carlos Patacas, Albano Cavaleiro, Pedro Faia, Oleksandr Bondarchuk, Filipe Fernandes
フォーマット:	論文
言語:	English
出版事項:	Elsevier 2024-06-01
シリーズ:	Journal of Science: Advanced Materials and Devices
主題:	NTC thin-film thermistor Reactive sputtering Nitride semiconductors Impedance spectroscopy Temperature sensing
オンライン･アクセス:	http://www.sciencedirect.com/science/article/pii/S2468217924000078

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