Remarkably High-Performance Nanosheet GeSn Thin-Film Transistor

High-performance p-type thin-film transistors (pTFTs) are crucial for realizing low-power display-on-panel and monolithic three-dimensional integrated circuits. Unfortunately, it is difficult to achieve a high hole mobility of greater than 10 cm<sup>2</sup>/V·s, even for SnO TFTs with a...

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Main Authors: Te Jui Yen, Albert Chin, Weng Kent Chan, Hsin-Yi Tiffany Chen, Vladimir Gritsenko
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/2/261
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author Te Jui Yen
Albert Chin
Weng Kent Chan
Hsin-Yi Tiffany Chen
Vladimir Gritsenko
author_facet Te Jui Yen
Albert Chin
Weng Kent Chan
Hsin-Yi Tiffany Chen
Vladimir Gritsenko
author_sort Te Jui Yen
collection DOAJ
description High-performance p-type thin-film transistors (pTFTs) are crucial for realizing low-power display-on-panel and monolithic three-dimensional integrated circuits. Unfortunately, it is difficult to achieve a high hole mobility of greater than 10 cm<sup>2</sup>/V·s, even for SnO TFTs with a unique single-hole band and a small hole effective mass. In this paper, we demonstrate a high-performance GeSn pTFT with a high field-effect hole mobility (μ<sub>FE</sub>), of 41.8 cm<sup>2</sup>/V·s; a sharp turn-on subthreshold slope (<i>SS</i>), of 311 mV/dec, for low-voltage operation; and a large on-current/off-current (I<sub>ON</sub>/I<sub>OFF</sub>) value, of 8.9 × 10<sup>6</sup>. This remarkably high I<sub>ON</sub>/I<sub>OFF</sub> is achieved using an ultra-thin nanosheet GeSn, with a thickness of only 7 nm. Although an even higher hole mobility (103.8 cm<sup>2</sup>/V·s) was obtained with a thicker GeSn channel, the I<sub>OFF</sub> increased rapidly and the poor I<sub>ON</sub>/I<sub>OFF</sub> (75) was unsuitable for transistor applications. The high mobility is due to the small hole effective mass of GeSn, which is supported by first-principles electronic structure calculations.
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spelling doaj.art-88a39cd28e5c4d57a92646e583041c852023-11-23T14:55:29ZengMDPI AGNanomaterials2079-49912022-01-0112226110.3390/nano12020261Remarkably High-Performance Nanosheet GeSn Thin-Film TransistorTe Jui Yen0Albert Chin1Weng Kent Chan2Hsin-Yi Tiffany Chen3Vladimir Gritsenko4Department of Electronics Engineering, National Yang Ming Chiao Tung University, Hsinchu 300, TaiwanDepartment of Electronics Engineering, National Yang Ming Chiao Tung University, Hsinchu 300, TaiwanDepartment of Engineering and System Science, National Tsing Hua University, Hsinchu 300, TaiwanDepartment of Engineering and System Science, National Tsing Hua University, Hsinchu 300, TaiwanRzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, 630090 Novosibirsk, RussiaHigh-performance p-type thin-film transistors (pTFTs) are crucial for realizing low-power display-on-panel and monolithic three-dimensional integrated circuits. Unfortunately, it is difficult to achieve a high hole mobility of greater than 10 cm<sup>2</sup>/V·s, even for SnO TFTs with a unique single-hole band and a small hole effective mass. In this paper, we demonstrate a high-performance GeSn pTFT with a high field-effect hole mobility (μ<sub>FE</sub>), of 41.8 cm<sup>2</sup>/V·s; a sharp turn-on subthreshold slope (<i>SS</i>), of 311 mV/dec, for low-voltage operation; and a large on-current/off-current (I<sub>ON</sub>/I<sub>OFF</sub>) value, of 8.9 × 10<sup>6</sup>. This remarkably high I<sub>ON</sub>/I<sub>OFF</sub> is achieved using an ultra-thin nanosheet GeSn, with a thickness of only 7 nm. Although an even higher hole mobility (103.8 cm<sup>2</sup>/V·s) was obtained with a thicker GeSn channel, the I<sub>OFF</sub> increased rapidly and the poor I<sub>ON</sub>/I<sub>OFF</sub> (75) was unsuitable for transistor applications. The high mobility is due to the small hole effective mass of GeSn, which is supported by first-principles electronic structure calculations.https://www.mdpi.com/2079-4991/12/2/261GeSnnanosheet TFTmonolithic 3D IC3D brain-mimicking ICs
spellingShingle Te Jui Yen
Albert Chin
Weng Kent Chan
Hsin-Yi Tiffany Chen
Vladimir Gritsenko
Remarkably High-Performance Nanosheet GeSn Thin-Film Transistor
Nanomaterials
GeSn
nanosheet TFT
monolithic 3D IC
3D brain-mimicking ICs
title Remarkably High-Performance Nanosheet GeSn Thin-Film Transistor
title_full Remarkably High-Performance Nanosheet GeSn Thin-Film Transistor
title_fullStr Remarkably High-Performance Nanosheet GeSn Thin-Film Transistor
title_full_unstemmed Remarkably High-Performance Nanosheet GeSn Thin-Film Transistor
title_short Remarkably High-Performance Nanosheet GeSn Thin-Film Transistor
title_sort remarkably high performance nanosheet gesn thin film transistor
topic GeSn
nanosheet TFT
monolithic 3D IC
3D brain-mimicking ICs
url https://www.mdpi.com/2079-4991/12/2/261
work_keys_str_mv AT tejuiyen remarkablyhighperformancenanosheetgesnthinfilmtransistor
AT albertchin remarkablyhighperformancenanosheetgesnthinfilmtransistor
AT wengkentchan remarkablyhighperformancenanosheetgesnthinfilmtransistor
AT hsinyitiffanychen remarkablyhighperformancenanosheetgesnthinfilmtransistor
AT vladimirgritsenko remarkablyhighperformancenanosheetgesnthinfilmtransistor