Catalytic metal-gate field effect transistors based on SiC for indoor air quality control

High-temperature iridium-gated field effect transistors based on silicon carbide have been used for sensitive detection of specific volatile organic compounds (VOCs) in concentrations of health concern, for indoor air quality monitoring and control. Formaldehyde, naphthalene, and benzene were studie...

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Main Authors: D. Puglisi, J. Eriksson, C. Bur, A. Schuetze, A. Lloyd Spetz, M. Andersson
Format: Article
Language:English
Published: Copernicus Publications 2015-01-01
Series:Journal of Sensors and Sensor Systems
Online Access:http://www.j-sens-sens-syst.net/4/1/2015/jsss-4-1-2015.pdf
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author D. Puglisi
J. Eriksson
C. Bur
A. Schuetze
A. Lloyd Spetz
M. Andersson
author_facet D. Puglisi
J. Eriksson
C. Bur
A. Schuetze
A. Lloyd Spetz
M. Andersson
author_sort D. Puglisi
collection DOAJ
description High-temperature iridium-gated field effect transistors based on silicon carbide have been used for sensitive detection of specific volatile organic compounds (VOCs) in concentrations of health concern, for indoor air quality monitoring and control. Formaldehyde, naphthalene, and benzene were studied as hazardous VOCs at parts per billion (ppb) down to sub-ppb levels. The sensor performance and characteristics were investigated at a constant temperature of 330 °C and at different levels of relative humidity up to 60%, showing good stability and repeatability of the sensor response, and excellent detection limits in the sub-ppb range.
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spelling doaj.art-8936fb7d32f6425083333413786fddfe2022-12-21T18:25:26ZengCopernicus PublicationsJournal of Sensors and Sensor Systems2194-87712194-878X2015-01-01411810.5194/jsss-4-1-2015Catalytic metal-gate field effect transistors based on SiC for indoor air quality controlD. Puglisi0J. Eriksson1C. Bur2A. Schuetze3A. Lloyd Spetz4M. Andersson5Department of Physics, Chemistry and Biology, Applied Sensor Science, Linköping University, 58183 Linköping, SwedenDepartment of Physics, Chemistry and Biology, Applied Sensor Science, Linköping University, 58183 Linköping, SwedenDepartment of Physics, Chemistry and Biology, Applied Sensor Science, Linköping University, 58183 Linköping, SwedenDepartment of Physics and Mechatronics Engineering, Lab for Measurement Technology, Saarland University, 66123 Saarbruecken, GermanyDepartment of Physics, Chemistry and Biology, Applied Sensor Science, Linköping University, 58183 Linköping, SwedenDepartment of Physics, Chemistry and Biology, Applied Sensor Science, Linköping University, 58183 Linköping, SwedenHigh-temperature iridium-gated field effect transistors based on silicon carbide have been used for sensitive detection of specific volatile organic compounds (VOCs) in concentrations of health concern, for indoor air quality monitoring and control. Formaldehyde, naphthalene, and benzene were studied as hazardous VOCs at parts per billion (ppb) down to sub-ppb levels. The sensor performance and characteristics were investigated at a constant temperature of 330 °C and at different levels of relative humidity up to 60%, showing good stability and repeatability of the sensor response, and excellent detection limits in the sub-ppb range.http://www.j-sens-sens-syst.net/4/1/2015/jsss-4-1-2015.pdf
spellingShingle D. Puglisi
J. Eriksson
C. Bur
A. Schuetze
A. Lloyd Spetz
M. Andersson
Catalytic metal-gate field effect transistors based on SiC for indoor air quality control
Journal of Sensors and Sensor Systems
title Catalytic metal-gate field effect transistors based on SiC for indoor air quality control
title_full Catalytic metal-gate field effect transistors based on SiC for indoor air quality control
title_fullStr Catalytic metal-gate field effect transistors based on SiC for indoor air quality control
title_full_unstemmed Catalytic metal-gate field effect transistors based on SiC for indoor air quality control
title_short Catalytic metal-gate field effect transistors based on SiC for indoor air quality control
title_sort catalytic metal gate field effect transistors based on sic for indoor air quality control
url http://www.j-sens-sens-syst.net/4/1/2015/jsss-4-1-2015.pdf
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AT aschuetze catalyticmetalgatefieldeffecttransistorsbasedonsicforindoorairqualitycontrol
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