Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates
The stress state is a crucial parameter for the design of innovative microelectromechanical systems based on silicon carbide (SiC) material. Hence, mechanical properties of such structures highly depend on the fabrication process. Despite significant progresses in thin-film growth and fabrication pr...
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| Format: | Article |
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MDPI AG
2019-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/12/801 |
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| author | Jaweb Ben Messaoud Jean-François Michaud Dominique Certon Massimo Camarda Nicolò Piluso Laurent Colin Flavien Barcella Daniel Alquier |
| author_facet | Jaweb Ben Messaoud Jean-François Michaud Dominique Certon Massimo Camarda Nicolò Piluso Laurent Colin Flavien Barcella Daniel Alquier |
| author_sort | Jaweb Ben Messaoud |
| collection | DOAJ |
| description | The stress state is a crucial parameter for the design of innovative microelectromechanical systems based on silicon carbide (SiC) material. Hence, mechanical properties of such structures highly depend on the fabrication process. Despite significant progresses in thin-film growth and fabrication process, monitoring the strain of the suspended SiC thin-films is still challenging. However, 3C-SiC membranes on silicon (Si) substrates have been demonstrated, but due to the low quality of the SiC/Si heteroepitaxy, high levels of residual strains were always observed. In order to achieve promising self-standing films with low residual stress, an alternative micromachining technique based on electrochemical etching of high quality homoepitaxy 4H-SiC layers was evaluated. This work is dedicated to the determination of their mechanical properties and more specifically, to the characterization of a 4H-SiC freestanding film with a circular shape. An inverse problem method was implemented, where experimental results obtained from bulge test are fitted with theoretical static load-deflection curves of the stressed membrane. To assess data validity, the dynamic behavior of the membrane was also investigated: Experimentally, by means of laser Doppler vibrometry (LDV) and theoretically, by means of finite element computations. The two methods provided very similar results since one obtained a Young’s modulus of 410 GPa and a residual stress value of 41 MPa from bulge test against 400 GPa and 30 MPa for the LDV analysis. The determined Young’s modulus is in good agreement with literature values. Moreover, residual stress values demonstrate that the fabrication of low-stressed SiC films is achievable thanks to the micromachining process developed. |
| first_indexed | 2024-12-21T15:30:17Z |
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| id | doaj.art-897aef27df204520b3e3901e2a2aae76 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-21T15:30:17Z |
| publishDate | 2019-11-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj.art-897aef27df204520b3e3901e2a2aae762022-12-21T18:58:47ZengMDPI AGMicromachines2072-666X2019-11-01101280110.3390/mi10120801mi10120801Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC SubstratesJaweb Ben Messaoud0Jean-François Michaud1Dominique Certon2Massimo Camarda3Nicolò Piluso4Laurent Colin5Flavien Barcella6Daniel Alquier7GREMAN UMR-CNRS 7347, Université de Tours, INSA Centre Val de Loire, 37071 Tours, FranceGREMAN UMR-CNRS 7347, Université de Tours, INSA Centre Val de Loire, 37071 Tours, FranceGREMAN UMR-CNRS 7347, Université de Tours, INSA Centre Val de Loire, 37071 Tours, FrancePaul Scherrer Institute, ODRA/116, 5232 Villigen, SwitzerlandSTMicroelectronics, Stradale Primosole, 50, 95121 Catania, ItalyGREMAN UMR-CNRS 7347, Université de Tours, INSA Centre Val de Loire, 37071 Tours, FranceGREMAN UMR-CNRS 7347, Université de Tours, INSA Centre Val de Loire, 37071 Tours, FranceGREMAN UMR-CNRS 7347, Université de Tours, INSA Centre Val de Loire, 37071 Tours, FranceThe stress state is a crucial parameter for the design of innovative microelectromechanical systems based on silicon carbide (SiC) material. Hence, mechanical properties of such structures highly depend on the fabrication process. Despite significant progresses in thin-film growth and fabrication process, monitoring the strain of the suspended SiC thin-films is still challenging. However, 3C-SiC membranes on silicon (Si) substrates have been demonstrated, but due to the low quality of the SiC/Si heteroepitaxy, high levels of residual strains were always observed. In order to achieve promising self-standing films with low residual stress, an alternative micromachining technique based on electrochemical etching of high quality homoepitaxy 4H-SiC layers was evaluated. This work is dedicated to the determination of their mechanical properties and more specifically, to the characterization of a 4H-SiC freestanding film with a circular shape. An inverse problem method was implemented, where experimental results obtained from bulge test are fitted with theoretical static load-deflection curves of the stressed membrane. To assess data validity, the dynamic behavior of the membrane was also investigated: Experimentally, by means of laser Doppler vibrometry (LDV) and theoretically, by means of finite element computations. The two methods provided very similar results since one obtained a Young’s modulus of 410 GPa and a residual stress value of 41 MPa from bulge test against 400 GPa and 30 MPa for the LDV analysis. The determined Young’s modulus is in good agreement with literature values. Moreover, residual stress values demonstrate that the fabrication of low-stressed SiC films is achievable thanks to the micromachining process developed.https://www.mdpi.com/2072-666X/10/12/8014h-sicbulk micromachiningelectrochemical etchingcircular membranebulge testvibrometrymechanical propertiesyoung’s modulusresidual stressfem |
| spellingShingle | Jaweb Ben Messaoud Jean-François Michaud Dominique Certon Massimo Camarda Nicolò Piluso Laurent Colin Flavien Barcella Daniel Alquier Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates Micromachines 4h-sic bulk micromachining electrochemical etching circular membrane bulge test vibrometry mechanical properties young’s modulus residual stress fem |
| title | Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates |
| title_full | Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates |
| title_fullStr | Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates |
| title_full_unstemmed | Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates |
| title_short | Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates |
| title_sort | investigation of the young s modulus and the residual stress of 4h sic circular membranes on 4h sic substrates |
| topic | 4h-sic bulk micromachining electrochemical etching circular membrane bulge test vibrometry mechanical properties young’s modulus residual stress fem |
| url | https://www.mdpi.com/2072-666X/10/12/801 |
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