One-Port Electronic Detection Strategies for Improving Sensitivity in Piezoelectric Resonant Sensor Measurements

One-Port Electronic Detection Strategies for Improving Sensitivity in Piezoelectric Resonant Sensor Measurements

This paper describes a one-port mechanical resonance detection scheme utilized on a piezoelectric thin film driven silicon circular diaphragm resonator and discusses the limitations to such an approach in degenerate mode mass detection sensors. The sensor utilizes degenerated vibration modes of a ra...

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Bibliographic Details
Main Authors: Zhongxu Hu, John Hedley, Neil Keegan, Julia Spoors, Barry Gallacher, Calum McNeil
Format: Article
Language:English
Published: MDPI AG 2016-10-01
Series:Sensors
Subjects:
microsensors
piezoelectric resonators
self-sensing
frequency tracking
Online Access:http://www.mdpi.com/1424-8220/16/11/1781

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