ZnO Films Incorporation Study on Macroporous Silicon Structure

In the present work, we developed hybrid nanostructures based on ZnO films deposited on macroporous silicon substrates using the sol–gel spin coating and ultrasonic spray pyrolysis (USP) techniques. The changes in the growth of ZnO films on macroporous silicon were studied using a UV-visible spectro...

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Main Authors: Lizeth Martínez, Godofredo García-Salgado, Francisco Morales-Morales, Bernardo Campillo, Angélica G. Hernández, Tangirala V. K. Karthik, María R. Jiménez-Vivanco, José Campos-Álvarez
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Language:English
Published: MDPI AG 2021-07-01
Series:Materials
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Online Access:https://www.mdpi.com/1996-1944/14/13/3697
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author Lizeth Martínez
Godofredo García-Salgado
Francisco Morales-Morales
Bernardo Campillo
Angélica G. Hernández
Tangirala V. K. Karthik
María R. Jiménez-Vivanco
José Campos-Álvarez
author_facet Lizeth Martínez
Godofredo García-Salgado
Francisco Morales-Morales
Bernardo Campillo
Angélica G. Hernández
Tangirala V. K. Karthik
María R. Jiménez-Vivanco
José Campos-Álvarez
author_sort Lizeth Martínez
collection DOAJ
description In the present work, we developed hybrid nanostructures based on ZnO films deposited on macroporous silicon substrates using the sol–gel spin coating and ultrasonic spray pyrolysis (USP) techniques. The changes in the growth of ZnO films on macroporous silicon were studied using a UV-visible spectrometer, an X-ray diffractometer (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). XRD analysis revealed the beneficial influence of macroporous silicon on the structural properties of ZnO films. SEM micrographs showed the growth and coverage of ZnO granular and flake-like crystals inside the pores of the substrate. The root mean square roughness (RMS) measured by AFM in the ZnO grown on the macroporous silicon substrate was up to one order of magnitude higher than reference samples. These results prove that the methods used in this work are effective to cover porous and obtain nano-morphologies of ZnO. These morphologies could be useful for making highly sensitive gas sensors.
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spelling doaj.art-89dd11660f534a0f80db58e3b82265982023-11-22T02:44:26ZengMDPI AGMaterials1996-19442021-07-011413369710.3390/ma14133697ZnO Films Incorporation Study on Macroporous Silicon StructureLizeth Martínez0Godofredo García-Salgado1Francisco Morales-Morales2Bernardo Campillo3Angélica G. Hernández4Tangirala V. K. Karthik5María R. Jiménez-Vivanco6José Campos-Álvarez7Tepeji Graduate School, Industrial Engineering, Autonomous Hidalgo State University, Av. del Maestro No. 41, Col. Noxtongo 2ª Sección, Tepeji del Rio, Hidalgo 42855, MexicoSemiconductor Devices Research Center, Autonomus University of Puebla, Ciudad Universitaria, Puebla Pue 72570, MexicoOptical Research Center, A. C., Loma del Bosque 115, Col. Lomas del Campestre, León 37150, MexicoFaculty of Chemistry, Metallurgical Engineering Department, Autonomous National University of Mexico, Mexico City 04510, MexicoTepeji Graduate School, Industrial Engineering, Autonomous Hidalgo State University, Av. del Maestro No. 41, Col. Noxtongo 2ª Sección, Tepeji del Rio, Hidalgo 42855, MexicoTepeji Graduate School, Industrial Engineering, Autonomous Hidalgo State University, Av. del Maestro No. 41, Col. Noxtongo 2ª Sección, Tepeji del Rio, Hidalgo 42855, MexicoSemiconductor Devices Research Center, Autonomus University of Puebla, Ciudad Universitaria, Puebla Pue 72570, MexicoInstitute for Renewable Energy, Autonomus National University of Mexico, Priv. Xochicalco S/N, Temixco, Morelos 62580, MexicoIn the present work, we developed hybrid nanostructures based on ZnO films deposited on macroporous silicon substrates using the sol–gel spin coating and ultrasonic spray pyrolysis (USP) techniques. The changes in the growth of ZnO films on macroporous silicon were studied using a UV-visible spectrometer, an X-ray diffractometer (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). XRD analysis revealed the beneficial influence of macroporous silicon on the structural properties of ZnO films. SEM micrographs showed the growth and coverage of ZnO granular and flake-like crystals inside the pores of the substrate. The root mean square roughness (RMS) measured by AFM in the ZnO grown on the macroporous silicon substrate was up to one order of magnitude higher than reference samples. These results prove that the methods used in this work are effective to cover porous and obtain nano-morphologies of ZnO. These morphologies could be useful for making highly sensitive gas sensors.https://www.mdpi.com/1996-1944/14/13/3697zinc oxidemacroporous siliconultrasonic spray pyrolysisspin coatingsol–gel
spellingShingle Lizeth Martínez
Godofredo García-Salgado
Francisco Morales-Morales
Bernardo Campillo
Angélica G. Hernández
Tangirala V. K. Karthik
María R. Jiménez-Vivanco
José Campos-Álvarez
ZnO Films Incorporation Study on Macroporous Silicon Structure
Materials
zinc oxide
macroporous silicon
ultrasonic spray pyrolysis
spin coating
sol–gel
title ZnO Films Incorporation Study on Macroporous Silicon Structure
title_full ZnO Films Incorporation Study on Macroporous Silicon Structure
title_fullStr ZnO Films Incorporation Study on Macroporous Silicon Structure
title_full_unstemmed ZnO Films Incorporation Study on Macroporous Silicon Structure
title_short ZnO Films Incorporation Study on Macroporous Silicon Structure
title_sort zno films incorporation study on macroporous silicon structure
topic zinc oxide
macroporous silicon
ultrasonic spray pyrolysis
spin coating
sol–gel
url https://www.mdpi.com/1996-1944/14/13/3697
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