Oxygen plasma assisted room temperature bonding for manufacturing SU-8 polymer micro/nanoscale nozzle

Electrohydrodynamic-jet (E-jet) printing is an on-demand additive manufacturing method that allows various functional materials to be directly deposited on the target substrate. Many theoretical and experimental results indicate that E-jet has scale effect, and reducing the inner diameter of the noz...

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Bibliographic Details
Main Authors: Guo Ran, Li Xuan, Niu Weilong, Feng Jianbo
Format: Article
Language:English
Published: De Gruyter 2023-09-01
Series:Nanotechnology Reviews
Subjects:
Online Access:https://doi.org/10.1515/ntrev-2023-0113