Structural characterization and phase transformations in metal oxide fi lms synthesized by Successive Ionic Layer Deposition (SILD) method
In this paper the peculiarities of phase composition and morphology of metal oxides synthesized by successive ionic layer deposition (SILD) method are discussed. The main attention is focused on SnO2–based metal oxides, which are promising materials for gas sensor applications. FTIR spectroscopy has...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Novi Sad
2009-06-01
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| Series: | Processing and Application of Ceramics |
| Subjects: | |
| Online Access: | http://www.tf.uns.ac.rs/publikacije/PAC/pdf/38%20PAC%2004.pdf |