Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

This work presents patterning of thick (10–50 µm) hybrid polymer structures of ORMOCER® by laser direct writing. ORMOCER® combine polymer-like fabrication processes with glass-like surface chemistry that is beneficial for many bio-microfluidic applications. ORMOCER® is liquid before exposure, so pat...

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Bibliographic Details
Main Authors: Akanksha Singh, Gianmario Scotti, Tiina Sikanen, Ville Jokinen, Sami Franssila
Format: Article
Language:English
Published: MDPI AG 2014-07-01
Series:Micromachines
Subjects:
lithography
resist
laser direct writing
ORMOCER®
microfluidics
Online Access:http://www.mdpi.com/2072-666X/5/3/472

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