Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference
One of the major concerns in the development of three-dimensional (3D) electric field sensors (EFSs) is their susceptibility to cross-axis coupling interference. The output signal for each sensing axis of a 3D EFS is often coupled by electric field components from the two other orthogonal sensing ax...
Main Authors: | Biyun Ling, Chunrong Peng, Ren Ren, Zhaozhi Chu, Zhouwei Zhang, Hucheng Lei, Shanhong Xia |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/18/3/870 |
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