Optical endpoint detection for plasma reduction of graphene oxide
The plasma reduction process for the production of reduced graphene oxide (rGO) requires precise process control in order to avoid the degradation of electrical characteristics. We report that the reduction status of the graphene oxides could be determined by monitoring the optical emission intensit...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2013-03-01
|
| Series: | AIP Advances |
| Online Access: | http://link.aip.org/link/doi/10.1063/1.4795240 |
| _version_ | 1818551389773627392 |
|---|---|
| author | MaengJun Kim Yung Ho Kahng Yong Jae Kim T. Prem kumar KwangMook Park Kwanghee Lee Jae-Hyung Jang |
| author_facet | MaengJun Kim Yung Ho Kahng Yong Jae Kim T. Prem kumar KwangMook Park Kwanghee Lee Jae-Hyung Jang |
| author_sort | MaengJun Kim |
| collection | DOAJ |
| description | The plasma reduction process for the production of reduced graphene oxide (rGO) requires precise process control in order to avoid the degradation of electrical characteristics. We report that the reduction status of the graphene oxides could be determined by monitoring the optical emission intensity at 844.6 nm. Properties of the rGO samples processed with various plasma exposure times were characterized by X-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, and 4-point probe measurements. Optimum electrical performance and surface morphology were obtained from the sample for which the reduction process was stopped when the emission intensity at 844.6 nm began to decrease. |
| first_indexed | 2024-12-12T08:59:16Z |
| format | Article |
| id | doaj.art-8b4d063db1484ca6b4ea04d4082d913f |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-12T08:59:16Z |
| publishDate | 2013-03-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-8b4d063db1484ca6b4ea04d4082d913f2022-12-22T00:29:53ZengAIP Publishing LLCAIP Advances2158-32262013-03-013303212103212110.1063/1.4795240Optical endpoint detection for plasma reduction of graphene oxideMaengJun KimYung Ho KahngYong Jae KimT. Prem kumarKwangMook ParkKwanghee LeeJae-Hyung JangThe plasma reduction process for the production of reduced graphene oxide (rGO) requires precise process control in order to avoid the degradation of electrical characteristics. We report that the reduction status of the graphene oxides could be determined by monitoring the optical emission intensity at 844.6 nm. Properties of the rGO samples processed with various plasma exposure times were characterized by X-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, and 4-point probe measurements. Optimum electrical performance and surface morphology were obtained from the sample for which the reduction process was stopped when the emission intensity at 844.6 nm began to decrease.http://link.aip.org/link/doi/10.1063/1.4795240 |
| spellingShingle | MaengJun Kim Yung Ho Kahng Yong Jae Kim T. Prem kumar KwangMook Park Kwanghee Lee Jae-Hyung Jang Optical endpoint detection for plasma reduction of graphene oxide AIP Advances |
| title | Optical endpoint detection for plasma reduction of graphene oxide |
| title_full | Optical endpoint detection for plasma reduction of graphene oxide |
| title_fullStr | Optical endpoint detection for plasma reduction of graphene oxide |
| title_full_unstemmed | Optical endpoint detection for plasma reduction of graphene oxide |
| title_short | Optical endpoint detection for plasma reduction of graphene oxide |
| title_sort | optical endpoint detection for plasma reduction of graphene oxide |
| url | http://link.aip.org/link/doi/10.1063/1.4795240 |
| work_keys_str_mv | AT maengjunkim opticalendpointdetectionforplasmareductionofgrapheneoxide AT yunghokahng opticalendpointdetectionforplasmareductionofgrapheneoxide AT yongjaekim opticalendpointdetectionforplasmareductionofgrapheneoxide AT tpremkumar opticalendpointdetectionforplasmareductionofgrapheneoxide AT kwangmookpark opticalendpointdetectionforplasmareductionofgrapheneoxide AT kwangheelee opticalendpointdetectionforplasmareductionofgrapheneoxide AT jaehyungjang opticalendpointdetectionforplasmareductionofgrapheneoxide |