High sensitive NH3 sensor based on electrochemically etched porous silicon
In the current study, porous silicon (por-Si) samples were fabricated by electrochemical etching at different times (20 min, 40 min, 60 min). Scanning electron microscope (SEM) images of horizontal cross-sections of the samples showed the formation of pores. The etched samples’ porosity was determin...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2020-01-01
|
| Series: | Cogent Engineering |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/23311916.2020.1810880 |
| _version_ | 1797706932736229376 |
|---|---|
| author | B.A. Khaniyev Y. Sagidolda K.K. Dikhanbayev A.O. Tileu M.K. Ibraimov |
| author_facet | B.A. Khaniyev Y. Sagidolda K.K. Dikhanbayev A.O. Tileu M.K. Ibraimov |
| author_sort | B.A. Khaniyev |
| collection | DOAJ |
| description | In the current study, porous silicon (por-Si) samples were fabricated by electrochemical etching at different times (20 min, 40 min, 60 min). Scanning electron microscope (SEM) images of horizontal cross-sections of the samples showed the formation of pores. The etched samples’ porosity was determined by the gravimetric method and amounted to 59.5%, 72.7%, 83.3%, respectively. Optical characteristics such as Raman spectra and photoluminescence (PL) spectra were obtained. The current-voltage and capacitance-voltage characteristics were also measured to calculate the sensitivity of the samples. The study results show that sample, which is etched for 40 minutes has a maximum response value to ammonia (NH3) gas than others, and the sensitivity is 33.25. The results demonstrated that it is possible to develop a high sensitive sensor device based on por-Si for determining NH3 gas in concentrations below 0.1 ppm at room temperature. |
| first_indexed | 2024-03-12T05:58:44Z |
| format | Article |
| id | doaj.art-8b75a536a1734619953c9778661765c2 |
| institution | Directory Open Access Journal |
| issn | 2331-1916 |
| language | English |
| last_indexed | 2024-03-12T05:58:44Z |
| publishDate | 2020-01-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | Cogent Engineering |
| spelling | doaj.art-8b75a536a1734619953c9778661765c22023-09-03T04:21:10ZengTaylor & Francis GroupCogent Engineering2331-19162020-01-017110.1080/23311916.2020.18108801810880High sensitive NH3 sensor based on electrochemically etched porous siliconB.A. Khaniyev0Y. Sagidolda1K.K. Dikhanbayev2A.O. Tileu3M.K. Ibraimov4Al-Farabi Kazakh UniversityAl-Farabi Kazakh UniversityAl-Farabi Kazakh UniversityAl-Farabi Kazakh UniversityAl-Farabi Kazakh UniversityIn the current study, porous silicon (por-Si) samples were fabricated by electrochemical etching at different times (20 min, 40 min, 60 min). Scanning electron microscope (SEM) images of horizontal cross-sections of the samples showed the formation of pores. The etched samples’ porosity was determined by the gravimetric method and amounted to 59.5%, 72.7%, 83.3%, respectively. Optical characteristics such as Raman spectra and photoluminescence (PL) spectra were obtained. The current-voltage and capacitance-voltage characteristics were also measured to calculate the sensitivity of the samples. The study results show that sample, which is etched for 40 minutes has a maximum response value to ammonia (NH3) gas than others, and the sensitivity is 33.25. The results demonstrated that it is possible to develop a high sensitive sensor device based on por-Si for determining NH3 gas in concentrations below 0.1 ppm at room temperature.http://dx.doi.org/10.1080/23311916.2020.1810880porous siliconammonia sensoroptical characteristicselectrical characteristics |
| spellingShingle | B.A. Khaniyev Y. Sagidolda K.K. Dikhanbayev A.O. Tileu M.K. Ibraimov High sensitive NH3 sensor based on electrochemically etched porous silicon Cogent Engineering porous silicon ammonia sensor optical characteristics electrical characteristics |
| title | High sensitive NH3 sensor based on electrochemically etched porous silicon |
| title_full | High sensitive NH3 sensor based on electrochemically etched porous silicon |
| title_fullStr | High sensitive NH3 sensor based on electrochemically etched porous silicon |
| title_full_unstemmed | High sensitive NH3 sensor based on electrochemically etched porous silicon |
| title_short | High sensitive NH3 sensor based on electrochemically etched porous silicon |
| title_sort | high sensitive nh3 sensor based on electrochemically etched porous silicon |
| topic | porous silicon ammonia sensor optical characteristics electrical characteristics |
| url | http://dx.doi.org/10.1080/23311916.2020.1810880 |
| work_keys_str_mv | AT bakhaniyev highsensitivenh3sensorbasedonelectrochemicallyetchedporoussilicon AT ysagidolda highsensitivenh3sensorbasedonelectrochemicallyetchedporoussilicon AT kkdikhanbayev highsensitivenh3sensorbasedonelectrochemicallyetchedporoussilicon AT aotileu highsensitivenh3sensorbasedonelectrochemicallyetchedporoussilicon AT mkibraimov highsensitivenh3sensorbasedonelectrochemicallyetchedporoussilicon |