Topography Measurement of Large-Range Microstructures through Advanced Fourier-Transform Method and Phase Stitching in Scanning Broadband Light Interferometry
Scanning broadband light interferometry (SBLI) has been widely utilized in surface metrology due to its non-contact and high-accuracy method. In SBLI, phase evaluation through Fourier Transform (FT) is a prevalent and efficient technique, where the topography measurement can often be achieved throug...
Main Authors: | Yi Zhou, Yan Tang, Yong Yang, Song Hu |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-10-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/8/11/319 |
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