A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities
In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerom...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/11/1375 |
| _version_ | 1797509311494094848 |
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| author | Junji Pu Kai Zeng Yulie Wu Dingbang Xiao |
| author_facet | Junji Pu Kai Zeng Yulie Wu Dingbang Xiao |
| author_sort | Junji Pu |
| collection | DOAJ |
| description | In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices. |
| first_indexed | 2024-03-10T05:15:56Z |
| format | Article |
| id | doaj.art-8c9f40aa98a24015a4ac71fb9892c42a |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T05:15:56Z |
| publishDate | 2021-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-8c9f40aa98a24015a4ac71fb9892c42a2023-11-23T00:26:36ZengMDPI AGMicromachines2072-666X2021-11-011211137510.3390/mi12111375A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles CavitiesJunji Pu0Kai Zeng1Yulie Wu2Dingbang Xiao3College of Intelligent Sciences, National University of Defense and Technology, Changsha 410073, ChinaCollege of Intelligent Sciences, National University of Defense and Technology, Changsha 410073, ChinaCollege of Intelligent Sciences, National University of Defense and Technology, Changsha 410073, ChinaCollege of Intelligent Sciences, National University of Defense and Technology, Changsha 410073, ChinaIn recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.https://www.mdpi.com/2072-666X/12/11/1375optical force accelerationlaser diodeelliptical Gaussian beamMEMS particles cavity |
| spellingShingle | Junji Pu Kai Zeng Yulie Wu Dingbang Xiao A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities Micromachines optical force acceleration laser diode elliptical Gaussian beam MEMS particles cavity |
| title | A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities |
| title_full | A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities |
| title_fullStr | A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities |
| title_full_unstemmed | A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities |
| title_short | A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities |
| title_sort | miniature optical force dual axis accelerometer based on laser diodes and small particles cavities |
| topic | optical force acceleration laser diode elliptical Gaussian beam MEMS particles cavity |
| url | https://www.mdpi.com/2072-666X/12/11/1375 |
| work_keys_str_mv | AT junjipu aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT kaizeng aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT yuliewu aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT dingbangxiao aminiatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT junjipu miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT kaizeng miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT yuliewu miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities AT dingbangxiao miniatureopticalforcedualaxisaccelerometerbasedonlaserdiodesandsmallparticlescavities |