Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity
In this study, a piezoelectric micromachined ultrasonic transducer (PMUT) is integrated with a microliter-sized volume-tunable Helmholtz resonator. The passive Helmholtz resonator is constructed using an SU8 photolithography-defined square opening plate as the neck portion, a 3D-printed hollow struc...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-10-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/22/19/7471 |