Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity

Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity

In this study, a piezoelectric micromachined ultrasonic transducer (PMUT) is integrated with a microliter-sized volume-tunable Helmholtz resonator. The passive Helmholtz resonator is constructed using an SU8 photolithography-defined square opening plate as the neck portion, a 3D-printed hollow struc...

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Bibliographic Details
Main Authors: Guo-Hua Feng, Wen-Sheng Chen
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Sensors
Subjects:
Helmholtz resonator
piezoelectric film
two-term power series curve
ultrasonic
volume-tunable cavity
Online Access:https://www.mdpi.com/1424-8220/22/19/7471

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