Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs

The compatibility of the advanced BSIM-CMG to the low frequency noise (LFN) simulation in amorphous IZO TFTs is evaluated over subthreshold and linear regions. Two kinds of devices with SiO2-SiNx and Al2O3 gate insulators are studied. In these devices, the 1/f noise is confirmed as the main componen...

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Bibliographic Details
Main Authors: Yayi Chen, Xingji Liu, Dengyun Lei, Yuan Liu, Rongsheng Chen, Yao Ni, Hoi-Sing Kwok, Wei Zhong
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Journal of the Electron Devices Society
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Online Access:https://ieeexplore.ieee.org/document/10466727/
Description
Summary:The compatibility of the advanced BSIM-CMG to the low frequency noise (LFN) simulation in amorphous IZO TFTs is evaluated over subthreshold and linear regions. Two kinds of devices with SiO2-SiNx and Al2O3 gate insulators are studied. In these devices, the 1/f noise is confirmed as the main component of LFN. Then the dominated origin of the 1/f noise is explained by the <inline-formula> <tex-math notation="LaTeX">$\Delta \text{N}$ </tex-math></inline-formula> model in devices with SiO2-SiNx layers, and by the <inline-formula> <tex-math notation="LaTeX">$\Delta \text{N}$ </tex-math></inline-formula>-<inline-formula> <tex-math notation="LaTeX">$\Delta \mu $ </tex-math></inline-formula> model in devices with Al2O3 layers, respectively. Based on these models, the interficial traps density and the Hooge&#x2019;s parameters are further calculated, and then applied to the extraction of noise parameters (NOIAeff, NOIB and NOIC) in BSIM-CMG. Compared to the measured data, the simulated results indicate that the noise can be well simulated by the improved BSIM-CMG both in the subthreshold and linear regions of IZO TFTs. It provides a comprehensive evaluation on the suitability of the BSIM-CMG for 1/f noise modelling in amorphous metal oxide TFTs.
ISSN:2168-6734