Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs

The compatibility of the advanced BSIM-CMG to the low frequency noise (LFN) simulation in amorphous IZO TFTs is evaluated over subthreshold and linear regions. Two kinds of devices with SiO2-SiNx and Al2O3 gate insulators are studied. In these devices, the 1/f noise is confirmed as the main componen...

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Main Authors: Yayi Chen, Xingji Liu, Dengyun Lei, Yuan Liu, Rongsheng Chen, Yao Ni, Hoi-Sing Kwok, Wei Zhong
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/10466727/
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author Yayi Chen
Xingji Liu
Dengyun Lei
Yuan Liu
Rongsheng Chen
Yao Ni
Hoi-Sing Kwok
Wei Zhong
author_facet Yayi Chen
Xingji Liu
Dengyun Lei
Yuan Liu
Rongsheng Chen
Yao Ni
Hoi-Sing Kwok
Wei Zhong
author_sort Yayi Chen
collection DOAJ
description The compatibility of the advanced BSIM-CMG to the low frequency noise (LFN) simulation in amorphous IZO TFTs is evaluated over subthreshold and linear regions. Two kinds of devices with SiO2-SiNx and Al2O3 gate insulators are studied. In these devices, the 1/f noise is confirmed as the main component of LFN. Then the dominated origin of the 1/f noise is explained by the <inline-formula> <tex-math notation="LaTeX">$\Delta \text{N}$ </tex-math></inline-formula> model in devices with SiO2-SiNx layers, and by the <inline-formula> <tex-math notation="LaTeX">$\Delta \text{N}$ </tex-math></inline-formula>-<inline-formula> <tex-math notation="LaTeX">$\Delta \mu $ </tex-math></inline-formula> model in devices with Al2O3 layers, respectively. Based on these models, the interficial traps density and the Hooge&#x2019;s parameters are further calculated, and then applied to the extraction of noise parameters (NOIAeff, NOIB and NOIC) in BSIM-CMG. Compared to the measured data, the simulated results indicate that the noise can be well simulated by the improved BSIM-CMG both in the subthreshold and linear regions of IZO TFTs. It provides a comprehensive evaluation on the suitability of the BSIM-CMG for 1/f noise modelling in amorphous metal oxide TFTs.
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spelling doaj.art-8d56377d2d404c46b858bcfbcd875aa82024-04-11T23:00:13ZengIEEEIEEE Journal of the Electron Devices Society2168-67342024-01-011227528010.1109/JEDS.2024.337586710466727Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTsYayi Chen0https://orcid.org/0000-0002-8281-7246Xingji Liu1Dengyun Lei2https://orcid.org/0000-0001-8935-649XYuan Liu3https://orcid.org/0000-0002-7289-2103Rongsheng Chen4https://orcid.org/0000-0002-7247-8420Yao Ni5https://orcid.org/0000-0002-6370-4799Hoi-Sing Kwok6https://orcid.org/0000-0002-2820-9530Wei Zhong7https://orcid.org/0000-0001-8935-649XSchool of Integrated Circuits, Guangdong University of Technology, Guangzhou, ChinaSchool of Integrated Circuits, Guangdong University of Technology, Guangzhou, ChinaSchool of Integrated Circuits, Guangdong University of Technology, Guangzhou, ChinaSchool of Integrated Circuits, Guangdong University of Technology, Guangzhou, ChinaSchool of Microelectronics, South China University of Technology, Guangzhou, ChinaSchool of Integrated Circuits, Guangdong University of Technology, Guangzhou, ChinaDepartment of Electronic and Computer Engineering, State Key Laboratory on Advanced Displays and Optoelectronics Technologies, The Hong Kong University of Science and Technology, Hong Kong, ChinaSchool of Integrated Circuits, Guangdong University of Technology, Guangzhou, ChinaThe compatibility of the advanced BSIM-CMG to the low frequency noise (LFN) simulation in amorphous IZO TFTs is evaluated over subthreshold and linear regions. Two kinds of devices with SiO2-SiNx and Al2O3 gate insulators are studied. In these devices, the 1/f noise is confirmed as the main component of LFN. Then the dominated origin of the 1/f noise is explained by the <inline-formula> <tex-math notation="LaTeX">$\Delta \text{N}$ </tex-math></inline-formula> model in devices with SiO2-SiNx layers, and by the <inline-formula> <tex-math notation="LaTeX">$\Delta \text{N}$ </tex-math></inline-formula>-<inline-formula> <tex-math notation="LaTeX">$\Delta \mu $ </tex-math></inline-formula> model in devices with Al2O3 layers, respectively. Based on these models, the interficial traps density and the Hooge&#x2019;s parameters are further calculated, and then applied to the extraction of noise parameters (NOIAeff, NOIB and NOIC) in BSIM-CMG. Compared to the measured data, the simulated results indicate that the noise can be well simulated by the improved BSIM-CMG both in the subthreshold and linear regions of IZO TFTs. It provides a comprehensive evaluation on the suitability of the BSIM-CMG for 1/f noise modelling in amorphous metal oxide TFTs.https://ieeexplore.ieee.org/document/10466727/InZnOthin film transistorslow frequency noiseBSIM-CMG
spellingShingle Yayi Chen
Xingji Liu
Dengyun Lei
Yuan Liu
Rongsheng Chen
Yao Ni
Hoi-Sing Kwok
Wei Zhong
Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs
IEEE Journal of the Electron Devices Society
InZnO
thin film transistors
low frequency noise
BSIM-CMG
title Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs
title_full Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs
title_fullStr Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs
title_full_unstemmed Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs
title_short Compatibility of the BSIM-CMG to the Low-Frequency Noise Simulation in Subthreshold and Linear Regions of Amorphous InZnO TFTs
title_sort compatibility of the bsim cmg to the low frequency noise simulation in subthreshold and linear regions of amorphous inzno tfts
topic InZnO
thin film transistors
low frequency noise
BSIM-CMG
url https://ieeexplore.ieee.org/document/10466727/
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